RHEED (Reflection High-Energy Electron Diffraction)

RHEED is a diffraction technique used to analyse the surface of ordered or crystalline materials usually undergoing a process of layer by layer growth such as during MBE (Molecular Beam Epitaxy) or PVD (Physical Vapour Deposition). The technique is well suited to monitoring in-situ deposition because its long working distance and grazing angle does not shadow the sample from the material being deposited. The individual diffraction spots can be monitored and usually exhibit oscillations in intensity as each new layer is formed, the peak of the oscillation represents the maximum degree of order since a new monolayer is complete. Our RHEED guns are available in 3 different version with different primary beam energy and are equipped with a long-life filament. The higher energy version exhibits a slightly better spot profile but the lower energy versions have a price advantage.