Imina Technologies

 

Imina Technologies SA is a market leader in the development of high-precision micro- and nanomanipulation systems. Founded in 2009, the company is headquartered in Lausanne, Switzerland, and has its roots in cutting-edge research conducted at the Swiss Federal Institute of Technology (EPFL). Imina Technologies serves industries and research institutions globally, providing innovative solutions that enable precise positioning, manipulation, and characterisation of samples at the micro- and nano- scales.

The company’s flagship product line, miBot™ manipulators, are designed for unmatched dexterity and accuracy, allowing users to interact with samples in ways that were previously difficult to achieve. These compact and mobile robotic systems are widely used in fields such as material science, semiconductor research, life sciences, and photonics. Imina’s technology is particularly valued for its versatility, allowing integration with a range of instruments, including scanning electron microscopes (SEM), focused ion beam (FIB) systems, and optical microscopes.

Through a commitment to innovation, customer-centric design, and Swiss engineering precision, Imina Technologies has established itself as a trusted partner for researchers and engineers aiming to push the boundaries of micro- and nanoscale exploration and manufacturing.

Imina has the following main product areas:

  • miBot™ Micromanipulators:
    • Compact and mobile robotic manipulators for high-precision micro- and nanomanipulation.
    • Designed for use with a variety of instruments, including SEM, FIB, and optical microscopes.
    • Applications include electrical probing, material testing, and sample positioning.
  • Prober Solutions:
    • Systems integrating miBot™ manipulators for electrical testing and characterization at the micro- and nanoscale.
    • Compatible with various environments, including SEM, vacuum chambers, and ambient conditions.
  • Sample Handling Platforms:
    • Modular platforms providing a stable and adaptable base for micromanipulation tasks.
    • Designed to support diverse experimental setups and workflows.
  • Software for Manipulator Control:
    • User-friendly interfaces and advanced control software for intuitive operation of miBot™ systems.
    • Features include precise positioning, automated routines, and data acquisition capabilities.
  • Customised Manipulation Solutions:
    • Tailored systems to meet specific customer needs in micro- and nanomanipulation.
    • Solutions designed for integration with specialized instruments or applications, for example Scanning Probe Microscopes (SPM) or nanoindentation systems.

Imina Technologies’ products are distinguished by their precision, versatility, and adaptability, making them indispensable tools for advanced research and industrial applications in fields such as material science, electronics, and nanotechnology.

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Imina Robot Micro (miBot™)

Imina’s Micro robots are the most important components of their probing and manipulation solutions, designed for customers who wish to use them in an optical microscope environment, or in an SEM environment where the highest level resolution is not required. They are extremely compact mobile cubes of just over 2x2cm horizontally, and with a low height of just 12.5mm above the stage they are compatible even with short working distance microscope objectives and SEMs. They are fully mobile actuators with the freedom to move at different speeds over the stage on which they sit in X, Y and rotation. Additionally the probe arm is able to move independently in Z.

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Imina Robot Nano (miBot™)

Imina’s Nano robots are the most important components of their probing and manipulation solutions, designed for customers who wish to use them in an SEM environment. They are extremely compact mobile cubes of just over 2x2cm horizontally, and with a low height of just 12.5mm above the stage they are compatible even with short working SEMs. They are fully mobile actuators with the freedom to move at different speeds over the stage on which they sit in X, Y and rotation. Additionally the probe arm is able to move independently in Z. There are two different versions of the Nano robot with different scanning range in the Z axis. The longer travel version facilitates easier approach of the probe to fragile samples and easier switching between different areas of the sample.

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Imina SM100 Stage Mounted Platform (4 Bot)

SEM-Mounted platform for up to 4 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina SM125 Stage Mounted Platform (8 Bot)

SEM-Mounted platform with a wider design to accomodate up to 8 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina LL10 Load lock platform (4 Bot)

A load-lock-transferrable SEM-Mounted platform for up to 4  miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina LL11 Load lock platform (8 Bot)

A larger load-lock-transferrable SEM-Mounted platform for up to 8 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Sample positioning XYZ sub stage

Move the sample independently from the probes in X, Y, Z directions with nm resolution. Reduce probe landing time and accelerate multiple device characterisation.

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Large sample adapter

The Large Sample Adapter (LSA) fits up to 4 miBots and is mounted on a Nanoprobing Stage (SM100 or SM125). It provides space below for large/tall samples. The LSA is mounted on the Nanoprobing stage with a manual knob and requires no tools for installation/ removal

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Thermal stage

Vibration-free thermal stage for precise temperature control in the range from -30°C to 150°C. Flexible radiator can be folded to fit the thermal stage into small SEM chambers.

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Optical fibre holder

This tool holder enables to easily attach an optical fibre to the arm of the miBot™ positioner. The fibre tip can thus be positioned within a centimetre range cubic workspace with nanometre resolution. The self-alignment of the fibre on the holder is ensured by a v-groove. A spring loaded clamping mechanism adapts to various fibre optic radius and allows to quickly adjust the fibre length.

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Turn-key probing platform (4 probe)

This compact table-top Probe Station is designed for micro-scale electrical characterisation of semiconductor dies and test devices under 1’’. It drives up to 4 miBot probers and connects their probe tips to third-party electrical source-measurement units. A high-magnification microscope with motorised zoom and a manual X-Y stage for sample positioning are included in this turnkey solution.

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Turn-key wafer-level probing platform (8 probe)

This probe station is designed for semi-automated electrical characterisation of sub-micron scale components on wafers up to 4’’. The platform drives up to 8 miBot probers and connects their probe tips to third-party electrical source-measurement units. A highly precise X-Y-Z wafer chuck (cooling/heating options available) and a powerful microscope with motorised zoom are part of this fully integrated solution. Automated probing of identical devices across the wafer can be included in this solution.

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Microprobing Platform Kit (4 probe)

Designed to enhance existing microscopy setups and to add electrical characterisation or manipulation capability to virtually any system. Typically this stage is integrated into existing optical microscopes and can accommodate up to 4 miBot™ micro probers

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Microprobing Platform Kit (1 probe)

Our smallest and most flexible stage, designed to accommodate a single miBot™ micro prober. Designed to enhance existing microscopy setups and to add electrical characterisation or manipulation capability to virtually any system.

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Micro Pipette holder

This tool holder enables to easily attach an glass micropipette to the arm of the miBot™ positioner in order to facilitate precise delivery of liquids into a sample. This can be useful for sample preparation applications or interacting with biological samples especially. The pipette tip can be positioned within a centimeter range cubic workspace with high resolution.

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Motion Controller MC410

Control unit for up to 4 miBot™ probers. The control unit comes with a control pad and a licence for Imina’s Precisio™ software Basic Edition

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