Shimadzu Turbo Pumps

Infraserv Vakuum Service: European Partner for Shimadzu Turbo Pumps

Infraserv Vakuum Service is a wholly owned subsidiary of Shimadzu Corporation, Japan. Specifically they are the European outlet and service provider for Shimadzu vacuum pumps, a global leader in precision instruments and equipment. Based just north of Munich in Germany, Infraserv is known for its expertise in vacuum technology, offering sales, maintenance, and repair services for Shimadzu pumps across Europe.  VSM Instruments works closely with Infraserv and Shimadzu and acts as their sales outlet in the United Kingdom, often offering their pumps in combination with our other equipment.

Together we provide a comprehensive range of vacuum solutions, including turbomolecular pumps, scroll pumps, and rotary vane pumps, catering to industries such as semiconductors, pharmaceuticals, and research laboratories. Infraserv’s dedicated technical team ensures reliable performance and long service life through preventive maintenance, rapid diagnostics, and efficient repair processes.

Infraserv is recognized for its strong customer support, fast spare part availability, and adherence to quality standards. Acting as a crucial link between Shimadzu and its European clientele, the company supports technological advancements by ensuring seamless integration and optimal functionality of Shimadzu’s vacuum products.

Shimadzu’s turbomolecular pumps (turbo pumps) are designed to meet the demanding requirements of high and ultra-high-vacuum environments in industries such as semiconductor manufacturing, analytical instruments, and academic and industrial research facilities. Their product range is known for its reliability, compact designs, energy efficiency, and high pumping speeds.

Key Features and Variants

  1. Pumping Speed Range
    • Shimadzu offers turbo pumps with pumping speeds ranging from small capacities (70 litres/second) to high-performance models exceeding 3,000 litres/second, catering to diverse application needs.
  2. Hybrid Bearing Technology
    • Many Shimadzu turbo pumps incorporate a hybrid bearing system, combining magnetic bearings for rotor stability with ceramic ball bearings for robust mechanical support, minimizing wear and extending operational life.
  3. Oil-Free and Clean Vacuum
    • The oil-free design ensures clean vacuum environments, making them ideal for sensitive processes in semiconductor and analytical applications.
  4. Integrated Controllers
    • Compact turbo pumps feature built-in controllers for ease of integration, reducing external hardware requirements and simplifying operation.
  5. High Durability and Temperature Tolerance
    • Advanced cooling mechanisms and durable materials enable Shimadzu turbo pumps to perform under challenging conditions, including exposure to corrosive gases or fluctuating temperatures.
  6. Energy Efficiency
    • Optimised motor designs and advanced control systems reduce energy consumption, ensuring cost-effective operation.

Applications

Shimadzu turbo pumps are widely used in:

  • Mass spectrometry
  • Surface analysis instruments
  • Semiconductor manufacturing
  • Thin-film deposition systems
  • High-energy physics research

By offering a diverse product lineup, Shimadzu turbo pumps deliver solutions tailored to various high-vacuum applications, ensuring precision, efficiency, and long-term reliability.

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Shimadzu TMP B70 Turbo Pump

The Shimadzu B70 Turbo Pump is a high-performance, compact, and reliable 70l/s turbomolecular pump designed for demanding vacuum applications. It offers excellent pumping speed and compression ratios suitable for a wide range of processes in research, industry, and electronics. This size of pump is typically suitable for smaller vacuum chambers such as load locks. Key advantages include:

  • Combination of ceramic and magnetic bearings for long service intervals and lower running costs
  • Suitable for UHV pressures in combination with a small dry backing pump
  • Integrated controller allows simple push button operation, or optional display unit for detailed operating information
  • High compression ratio for optimised operation with light gases
  • Mountable in any orientation
  • Fast delivery times
  • Low power consumption and heat generation
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Shimadzu TMP B300 Turbo Pump

The Shimadzu B300 Turbo Pump is a high-performance, compact, and reliable 300l/s turbomolecular pump designed for demanding vacuum applications. It offers excellent pumping speed and compression ratios suitable for a wide range of processes in research, industry, and electronics. This size of pump is typically suitable for smaller vacuum chambers such as load locks. Key advantages include:

  • Combination of ceramic and magnetic bearings for long service intervals and lower running costs
  • Suitable for UHV pressures in combination with a small dry backing pump
  • Integrated controller allows simple push button operation, or optional display unit for detailed operating information
  • High compression ratio for optimised operation with light gases
  • Mountable in any orientation
  • Fast delivery times
  • Low power consumption and heat generation
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Shimadzu EI-DPS240 Display Unit with Power Supply

The Shimadzu EI-DPS240 display unit is designed to work seamlessly with Shimadzu B70 and B300 series turbo pumps. The unit provides a display of key pump parameters in a conveniently sized unit. It can also be used to display the pressure reading from any pressure gauge with a 0-10V analogue output and provides convenient interlock functions.

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Kashiyama NeoDry E series roots backing pump

The Kashiyama E series pumps offer considerable advantages over a traditional dry scroll pump. They operate by means of two counter-rotating multi-stage root rotors which operate without contact. They are completely dry, particulate free and air cooled. Above all they are much quieter in operation than a dry scroll pump.

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Kashiyama NeoDry G series roots backing pump

The Kashiyama G series pumps offer a step up in some key specifications compared to the E series. In particular they are even quieter, slightly smaller and meet the European harmonic emission requirements. In general Kashiyama pumps offer considerable advantages over a traditional dry scroll pump. They operate by means of two counter-rotating multi-stage root rotors which operate without contact. They are completely dry, particulate free and air cooled. Above all they are much quieter in operation than a dry scroll pump.

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