Imina LL10 Load lock platform (4 Bot)
A load-lock-transferrable SEM-Mounted platform for up to 4 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.
Key Features
- Compact design (diameter: 100mm)
- Up to 4 independently driven miBot™ nanoprobers
- Sample size up to approx. 1”
- Typical airlock door inner dimensions: 100 (w) x 45 (h) mm
