Nano solutions for electron microscopes

Up to 8 miBot™ nanoprobers can be delivered in various configurations and options to adapt to your specific application requirements and microscopy equipment. The compact and light platforms for the robots are compatible with any electron microscope and can either be mounted on the SEM sample positioning stage, or be loaded via the SEM load-lock.

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Nano solutions for electron microscopes

Up to 8 miBot™ nanoprobers can be delivered in various configurations and options to adapt to your specific application requirements and microscopy equipment. The compact and light platforms for the robots are compatible with any electron microscope and can either be mounted on the SEM sample positioning stage, or be loaded via the SEM load-lock.

Key Features


  • Flexible platform configurations
  • Compatible with the most advanced microscopes due to short working distance, tilt and magnetic immersion lens compatibility
  • Install the system in minutes
  • One software to control, measure and report

Nano solutions for electron microscopes

Up to 8 miBot™ nanoprobers can be delivered in various configurations and options to adapt to your specific application requirements and microscopy equipment. The compact and light platforms for the robots are compatible with any electron microscope and can either be mounted on the SEM sample positioning stage, or be loaded via the SEM load-lock.

Key Features


  • Flexible platform configurations
  • Compatible with the most advanced microscopes due to short working distance, tilt and magnetic immersion lens compatibility
  • Install the system in minutes
  • One software to control, measure and report

Imina Robot Nano (miBot™)

Imina’s Nano robots are the most important components of their probing and manipulation solutions, designed for customers who wish to use them in an SEM environment. They are extremely compact mobile cubes of just over 2x2cm horizontally, and with a low height of just 12.5mm above the stage they are compatible even with short working SEMs. They are fully mobile actuators with the freedom to move at different speeds over the stage on which they sit in X, Y and rotation. Additionally the probe arm is able to move independently in Z. There are two different versions of the Nano robot with different scanning range in the Z axis. The longer travel version facilitates easier approach of the probe to fragile samples and easier switching between different areas of the sample.

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Imina SM100 Stage Mounted Platform (4 Bot)

SEM-Mounted platform for up to 4 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina SM125 Stage Mounted Platform (8 Bot)

SEM-Mounted platform with a wider design to accomodate up to 8 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina LL10 Load lock platform (4 Bot)

A load-lock-transferrable SEM-Mounted platform for up to 4  miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Imina LL11 Load lock platform (8 Bot)

A larger load-lock-transferrable SEM-Mounted platform for up to 8 miBot™ nanoprobers including the electrical connections to the robots, electrical feedthrough and customisation for your SEM system. Central mounting point for an SEM sample stub.

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Large sample adapter

The Large Sample Adapter (LSA) fits up to 4 miBots and is mounted on a Nanoprobing Stage (SM100 or SM125). It provides space below for large/tall samples. The LSA is mounted on the Nanoprobing stage with a manual knob and requires no tools for installation/ removal

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Motion Controller MC410

Control unit for up to 4 miBot™ probers. The control unit comes with a control pad and a licence for Imina’s Precisio™ software Basic Edition

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Sample positioning XYZ sub stage

Move the sample independently from the probes in X, Y, Z directions with nm resolution. Reduce probe landing time and accelerate multiple device characterisation.

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Thermal stage

Vibration-free thermal stage for precise temperature control in the range from -30°C to 150°C. Flexible radiator can be folded to fit the thermal stage into small SEM chambers.

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Optical fibre holder

This tool holder enables to easily attach an optical fibre to the arm of the miBot™ positioner. The fibre tip can thus be positioned within a centimetre range cubic workspace with nanometre resolution. The self-alignment of the fibre on the holder is ensured by a v-groove. A spring loaded clamping mechanism adapts to various fibre optic radius and allows to quickly adjust the fibre length.

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