Imina Robot Nano (miBot™)
Imina’s Nano robots are the most important components of their probing and manipulation solutions, designed for customers who wish to use them in an SEM environment. They are extremely compact mobile cubes of just over 2x2cm horizontally, and with a low height of just 12.5mm above the stage they are compatible even with short working SEMs. They are fully mobile actuators with the freedom to move at different speeds over the stage on which they sit in X, Y and rotation. Additionally the probe arm is able to move independently in Z. There are two different versions of the Nano robot with different scanning range in the Z axis. The longer travel version facilitates easier approach of the probe to fragile samples and easier switching between different areas of the sample.
Key Features
| Degrees of freedom | 4 independently driven (X,Y,R,Z) per prober | |
| Dimensions & weight | Body: 20.5 x 21.7 x 12.5 mm3 Arm: 8.3 mm (without tool) Weight: 12 g (without tool) |
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| Max. positioning resolution | Motion modes: coarse (stepping) and fine (scanning) Stepping: 60 nm (X, Y), 120 nm (Z) Scanning: 0.02 nm (X, Y), 0.1 nm (Z) |
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| Motion range | Stepping (XY,R,Z): 20 x 20 mm2 , ± 180°, 41° Scanning (X Y): 250 x 440 nm Note: in stepping, actual X, Y, R range are only limited by the size and shape of the stage where the miBot moves, and the length of the driving cable. |
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| Speed | X and Y: up to 1.5 mm.s-1 Z: up to 150 mrad.s-1 | |
| Forces & torques | X and Y: push: 0.3 N Z: lift: 0.7 mNm (5 g) hold: 0.2 N hold: 0.9 mNm (6 g) |
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| Tilt angle | Holding position up to 55° | |
| Drift | < 1 nm/min | |
| Tool holders | Range of holders for probes and optical fibers | |
| Electrical probing | ||
| Voltage range | ± 100V | |
| Current range | 100 mA | |
| Leakage current | <100 fA/V | |
| Bandwidth | Max. 25 MHz | |
| Resistance | Approx. 3.5 Ω from probe tip to flange connectors |
