Turn-key wafer-level probing platform (8 probe)

This probe station is designed for semi-automated electrical characterisation of sub-micron scale components on wafers up to 4’’. The platform drives up to 8 miBot probers and connects their probe tips to third-party electrical source-measurement units. A highly precise X-Y-Z wafer chuck (cooling/heating options available) and a powerful microscope with motorised zoom are part of this fully integrated solution. Automated probing of identical devices across the wafer can be included in this solution.

Imina Technologies
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Key Features


  • Integral microscope (1.1um resolution) and camera (1920×1200 pixels)
  • Motorised sample stage for samples up to 4″ with 110x110mm travel and 1um positioning resolution
  • Space for up to 8 miBot™ micro probers
Turn-key wafer-level probing platform (8 probe)

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