Microprobing Solutions for Optical Microscopes

The MICRO product line has several different platforms that accommodate up to 8 miBot™ microprobers. Stand-alone MICRO solutions include a microscope and a sample positioning stage. We also offer microprobing platform kits for flexible integration with other microscopy equipment. Each solution enables the user to independently position probes over millimeters with a resolution down to a few tens of nanometers. miBots can also be used to hold optical fibers, sensors, etc.

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Microprobing Solutions for Optical Microscopes

The MICRO product line has several different platforms that accommodate up to 8 miBot™ microprobers. Stand-alone MICRO solutions include a microscope and a sample positioning stage. We also offer microprobing platform kits for flexible integration with other microscopy equipment. Each solution enables the user to independently position probes over millimeters with a resolution down to a few tens of nanometers. miBots can also be used to hold optical fibers, sensors, etc.

Key Features


Integrations possible into:

  • Upright and inverted optical microscopes
  • Probe stations
  • Semiconductor inspection tools
  • Atomic force microscopes (AFM)
  • Glove boxes and environmental chambers
  • Nanoindenters

We integrate our solutions with these types of instruments from a wide range of different manufacturers, many of whom recommend Imina products. We are not tied to instruments from any specific manufacturer, so if you are looking for a specific integration and it is not listed, please contact us.

Microprobing Solutions for Optical Microscopes

The MICRO product line has several different platforms that accommodate up to 8 miBot™ microprobers. Stand-alone MICRO solutions include a microscope and a sample positioning stage. We also offer microprobing platform kits for flexible integration with other microscopy equipment. Each solution enables the user to independently position probes over millimeters with a resolution down to a few tens of nanometers. miBots can also be used to hold optical fibers, sensors, etc.

Key Features


Integrations possible into:

  • Upright and inverted optical microscopes
  • Probe stations
  • Semiconductor inspection tools
  • Atomic force microscopes (AFM)
  • Glove boxes and environmental chambers
  • Nanoindenters

We integrate our solutions with these types of instruments from a wide range of different manufacturers, many of whom recommend Imina products. We are not tied to instruments from any specific manufacturer, so if you are looking for a specific integration and it is not listed, please contact us.

Imina Robot Micro (miBot™)

Imina’s Micro robots are the most important components of their probing and manipulation solutions, designed for customers who wish to use them in an optical microscope environment, or in an SEM environment where the highest level resolution is not required. They are extremely compact mobile cubes of just over 2x2cm horizontally, and with a low height of just 12.5mm above the stage they are compatible even with short working distance microscope objectives and SEMs. They are fully mobile actuators with the freedom to move at different speeds over the stage on which they sit in X, Y and rotation. Additionally the probe arm is able to move independently in Z.

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Turn-key wafer-level probing platform (8 probe)

This probe station is designed for semi-automated electrical characterisation of sub-micron scale components on wafers up to 4’’. The platform drives up to 8 miBot probers and connects their probe tips to third-party electrical source-measurement units. A highly precise X-Y-Z wafer chuck (cooling/heating options available) and a powerful microscope with motorised zoom are part of this fully integrated solution. Automated probing of identical devices across the wafer can be included in this solution.

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Turn-key probing platform (4 probe)

This compact table-top Probe Station is designed for micro-scale electrical characterisation of semiconductor dies and test devices under 1’’. It drives up to 4 miBot probers and connects their probe tips to third-party electrical source-measurement units. A high-magnification microscope with motorised zoom and a manual X-Y stage for sample positioning are included in this turnkey solution.

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Microprobing Platform Kit (4 probe)

Designed to enhance existing microscopy setups and to add electrical characterisation or manipulation capability to virtually any system. Typically this stage is integrated into existing optical microscopes and can accommodate up to 4 miBot™ micro probers

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Microprobing Platform Kit (1 probe)

Our smallest and most flexible stage, designed to accommodate a single miBot™ micro prober. Designed to enhance existing microscopy setups and to add electrical characterisation or manipulation capability to virtually any system.

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Motion Controller MC410

Control unit for up to 4 miBot™ probers. The control unit comes with a control pad and a licence for Imina’s Precisio™ software Basic Edition

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Micro Pipette holder

This tool holder enables to easily attach an glass micropipette to the arm of the miBot™ positioner in order to facilitate precise delivery of liquids into a sample. This can be useful for sample preparation applications or interacting with biological samples especially. The pipette tip can be positioned within a centimeter range cubic workspace with high resolution.

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Optical fibre holder

This tool holder enables to easily attach an optical fibre to the arm of the miBot™ positioner. The fibre tip can thus be positioned within a centimetre range cubic workspace with nanometre resolution. The self-alignment of the fibre on the holder is ensured by a v-groove. A spring loaded clamping mechanism adapts to various fibre optic radius and allows to quickly adjust the fibre length.

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