VBGDV6/16 UHV Fine Leak Valve

A UHV fine leak valve with DN16CF flanges designed as a highly controllable manually-operated gas inlet for vacuum chambers, ion sources, plasma sources etc.

Key Features


  • Flanges: DN16CF rotatable
  • Leak rate when closed: <10-11 mbar.l.s-1
  • Controllable gas dosing leak rate: 10-11-10-1 mbar.l.s-1
  • Bakeout temperature up to 400ºC
VBGDV6/16 UHV Fine Leak Valve
VBGDV6/16 UHV Fine Leak Valve - Image 2

VBGDV6/16

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