VBMEGA25 Series XYZ Manipulators

The MEGA25 series is our largest single bellows XYZ manipulator. It comes as standard with a DN160CF base flange (DN200CF by request), and a DN160CF moving flange (DN100CF or DN63CF by request). The XY table is at the bottom rather than the top for maximum rigidity a compact minimum flange to flange distance. With a 150mm inner diameter of the bellows, to obtain the full +/-25mm XY travel, the sample stage support rod and any associated wiring must be 100mm diameter or less. The manipulator can be supplied with all axes manually-operated, motorised Z axis or with all 3 axes motorised. Z travels are available from 50-700mm. The manipulator has a maximum 30kg load on the z axis.

Key Features


  • Z travel from 50-700mm
  • X/Y travel +/-25mm vector sum
  • Bellows inner diameter 150mm
  • Micrometer scales on all axes for repeatable positioning
  • Resolution: 0.01mm manual, 0.001mm motorised
  • DN160CF base flange with threaded holes
  • DN160CF top flange with threaded holes (with through holes for travels >150mm)
  • UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
  • Flanges 316LN, tube and bellows 316L stainless steel
  • Pressure range 1 bar – 1×10-11 mbar
  • Maximum load on Z axis 40kg
  • One positionable mechanical limit for the Z axis to limit the travel within its range
  • Options available (not listed in the table below, please ask):
    • DN63CF or DN100CF top flange
    • DN200CF base flange
    • Base flange with through holes rather than threaded (length A increases by 35mm)
    • Manual handwheel at the top instead of the bottom for handwheel version (O at end of part number, adds 35mm to length B)
    • motorisation of Z axis with 2 phase stepper motor PKP 299 D 45B (Oriental) NEMA 34 / 6 Nm
    • motorisation of XY axes with 2 phase stepper motor PKP268MD28B (Oriental) NEMA 23 / 2 Nm
    • Linear encoder, motor encoder
    • Limit switches to provide feedback if an axis reaches either end of its travel
Part No.Travel (mm)Length A - flange-flange (mm)Length B (mm) see drawingWeight (kg)Actuation ZActuation XY
VBMEGA25-5050210-26051353.5ManualManual
VBMEGA25-50+
VBMEGA25-50ZS250210-26051360.5MotorisedManual
VBMEGA25-50ZS2+
VBMEGA25-50S250210-26051362.5MotorisedMotorised
VBMEGA25-50S2+
VBMEGA25-7575210-28553854.3ManualManual
VBMEGA25-75+
VBMEGA25-75ZS275210-28553861.3MotorisedManual
VBMEGA25-75ZS2+
VBMEGA25-75S275210-28553863.5MotorisedMotorised
VBMEGA25-75S2+
VBMEGA25-100100210-31056355.0ManualManual
VBMEGA25-100+
VBMEGA25-100ZS2100210-31056362.0MotorisedManual
VBMEGA25-100ZS2+
VBMEGA25-100S2100210-31056364.0MotorisedMotorised
VBMEGA25-100S2+
VBMEGA25-150150309-45961356.5ManualManual
VBMEGA25-150+
VBMEGA25-150ZS2150309-45961363.5MotorisedManual
VBMEGA25-150ZS2+
VBMEGA25-150S2150309-45961365.5MotorisedMotorised
VBMEGA25-150S2+
VBMEGA25-200200309-50966358.0ManualManual
VBMEGA25-200+
VBMEGA25-200ZS2200309-50966365.0MotorisedManual
VBMEGA25-200ZS2+
VBMEGA25-200S2200309-50966367.0MotorisedMotorised
VBMEGA25-200S2+
VBMEGA25-250250309-55971359.5ManualManual
VBMEGA25-250+
VBMEGA25-250ZS2250309-55971366.5MotorisedManual
VBMEGA25-250ZS2+
VBMEGA25-250S2250309-55971368.5MotorisedMotorised
VBMEGA25-250S2+
VBMEGA25-300300309-60976361.0ManualManual
VBMEGA25-300+
VBMEGA25-300ZS2300309-60976367.0MotorisedManual
VBMEGA25-300ZS2+
VBMEGA25-300S2300309-60976369.0MotorisedMotorised
VBMEGA25-300S2+
VBMEGA25-350350309-65981362.0ManualManual
VBMEGA25-350+
VBMEGA25-350ZS2350309-65981368.0MotorisedManual
VBMEGA25-350ZS2+
VBMEGA25-350S2350309-65981370.0MotorisedMotorised
VBMEGA25-350S2+
VBMEGA25-400400309-70986363.5ManualManual
VBMEGA25-400+
VBMEGA25-400ZS2400309-70986369.0MotorisedManual
VBMEGA25-400ZS2+
VBMEGA25-400S2400309-70986371.0MotorisedMotorised
VBMEGA25-400S2+
VBMEGA25-450450309-75991364.5ManualManual
VBMEGA25-450+
VBMEGA25-450ZS2450309-75991370.5MotorisedManual
VBMEGA25-450ZS2+
VBMEGA25-450S2450309-75991372.5MotorisedMotorised
VBMEGA25-450S2+
VBMEGA25-500500319-81997367.5ManualManual
VBMEGA25-500+
VBMEGA25-500ZS2500319-81997373.0MotorisedManual
VBMEGA25-500ZS2+
VBMEGA25-500S2500319-81997375.0MotorisedMotorised
VBMEGA25-500S2+
VBMEGA25-550550329-879103369.0ManualManual
VBMEGA25-550+
VBMEGA25-550ZS2550329-879103375.5MotorisedManual
VBMEGA25-550ZS2+
VBMEGA25-550S2550329-879103377.5MotorisedMotorised
VBMEGA25-550S2+
VBMEGA25-600600339-939109370.5ManualManual
VBMEGA25-600+
VBMEGA25-600ZS2600339-939109378.0MotorisedManual
VBMEGA25-600ZS2+
VBMEGA25-600S2600339-939109380.0MotorisedMotorised
VBMEGA25-600S2+
VBMEGA25-700700359-1059121373.5ManualManual
VBMEGA25-700+
VBMEGA25-700ZS2700359-1059121383.0MotorisedManual
VBMEGA25-700ZS2+
VBMEGA25-700S2700359-1059121385.0MotorisedMotorised
VBMEGA25-700S2+

VBMEGA25-50

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VBMEGA25-50ZS2

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VBMEGA25-50S2

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VBMEGA25-75

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VBMEGA25-75ZS2

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VBMEGA25-75S2

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VBMEGA25-100

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VBMEGA25-100ZS2

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VBMEGA25-100S2

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VBMEGA25-150

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VBMEGA25-150ZS2

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VBMEGA25-150S2

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VBMEGA25-200

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VBMEGA25-200ZS2

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VBMEGA25-200S2

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VBMEGA25-250

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VBMEGA25-250ZS2

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VBMEGA25-250S2

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VBMEGA25-300

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VBMEGA25-300ZS2

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VBMEGA25-300S2

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VBMEGA25-350

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VBMEGA25-350ZS2

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VBMEGA25-350S2

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VBMEGA25-400

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VBMEGA25-400ZS2

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VBMEGA25-400S2

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VBMEGA25-450

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VBMEGA25-450ZS2

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VBMEGA25-450S2

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VBMEGA25-500

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VBMEGA25-500ZS2

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VBMEGA25-500S2

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VBMEGA25-550

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VBMEGA25-550ZS2

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VBMEGA25-550S2

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VBMEGA25-600

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VBMEGA25-600ZS2

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VBMEGA25-600S2

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VBMEGA25-700

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VBMEGA25-700ZS2

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VBMEGA25-700S2

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