VBPMM12-X UHV X-Table

Key Features

• Base flange DN63CF with threaded holes (DN100CF optionally – please ask)
• Moving flange DN63CF with threaded holes (DN40CF, double drilled optionally – please ask)
• Travel +/-12.5mm
• Bellows inner diameter 65mm
• Weight limit for mounted parts: 20kg
• Precision 0.01mm manual version, 0.001mm motorised version
• UHV compatible, bakeout up to 230ºC (motor has to be removed if motorised)
• Flanges 316LN, tube and bellows 316L stainless steel
• Pressure range 1 bar – 1×10^-11 mbar
• Manual actuation or 2 Phase stepper motor: PKP 268 MD 28B (Oriental)
• Optional limit switches or linear encoder (please ask)