VBX40-12 UHV X-Table
Key Features
- Base flange DN40CF with threaded holes, double drilled (DN63CF optionally – please ask)
- Moving flange DN40CF with threaded holes, double drilled
- Travel +/-12.5mm
- Bellows inner diameter 39mm
- Weight limit for mounted parts: 20kg
- Precision 0.01mm manual version, 0.001mm motorised version
- UHV compatible, bakeout up to 230ºC (motor has to be removed if motorised)
- Flanges 316LN, tube and bellows 316L stainless steel
- Pressure range 1 bar – 1×10-11 mbar
- Manual actuation or 2 Phase stepper motor: PKP 268 MD 28B (Oriental)
| Part No. | Actuation | Weight (kg) | |
|---|---|---|---|
| VBX40-12 | Manual | 3.1 | |
| VBX40-12 | |||
| VBX40-12S2 | Motor | 3.8 | |
| VBX40-12S2 |
