Low Energy Ion Scattering (LEIS)

Low Energy Ion Scattering (LEIS) is a special surface analysis technique which is optimised to provide information on the surface composition of only the uppermost layers of the surface. While other techniques such as TOF-SIMS and XPS provide a much greater information depth. Information on the surface layer is especially valuable since the outer surface of the material is of primary importance in determining its physical and chemical interactions.

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Low Energy Ion Scattering (LEIS)

Low Energy Ion Scattering (LEIS) is a special surface analysis technique which is optimised to provide information on the surface composition of only the uppermost layers of the surface. While other techniques such as TOF-SIMS and XPS provide a much greater information depth. Information on the surface layer is especially valuable since the outer surface of the material is of primary importance in determining its physical and chemical interactions.

Key Features


• Quantitative, elemental characterisation of the top atomic layer
• Spectroscopy, imaging and depth profiling capabilities
• Time-of-flight mass filtering for improved sensitivity
• Analysis of rough and non-conductive materials

Low Energy Ion Scattering (LEIS)

Low Energy Ion Scattering (LEIS) is a special surface analysis technique which is optimised to provide information on the surface composition of only the uppermost layers of the surface. While other techniques such as TOF-SIMS and XPS provide a much greater information depth. Information on the surface layer is especially valuable since the outer surface of the material is of primary importance in determining its physical and chemical interactions.

Key Features


• Quantitative, elemental characterisation of the top atomic layer
• Spectroscopy, imaging and depth profiling capabilities
• Time-of-flight mass filtering for improved sensitivity
• Analysis of rough and non-conductive materials

The Qtac is a high sensitivity Low Energy Ion Scattering (LEIS) instrument. It is extremely surface-sensitive, providing quantitative elemental characterisation of the top atomic layer.

This instrument has been developed to include small spot analysis, surface imaging, and both static and dynamic depth profiling.

Its unique surface sensitivity makes the Qtac the perfect tool to study surface processes. The Qtac provides valuable information in many production and research areas on materials such as catalysts, semiconductors, metals, polymers, and fuel cells.