VBMAX25 Series XYZ Manipulators

The MAX25 series is a large single bellows XYZ manipulator available as standard with a DN100CF base flange (DN160CF or DN200CF by request), and a DN100CF moving flange (DN63CF by request). Unlike the PM125, the XY table is at the bottom rather than the top for maximum rigidity and a more compact minimum flange to flange distance for the respective travels. With a 102mm inner diameter of the bellows, to obtain the full +/-25mm XY travel, the sample stage support rod and any associated wiring must be 52mm diameter or less. The manipulator can be supplied with all axes manually-operated, motorised Z axis or with all 3 axes motorised. Z travels are available from 50-700mm. The manipulator has a maximum 40kg load on the z axis.

Key Features

Z travel from 50-700mm
X/Y travel +/-25mm vector sum
Bellows inner diameter 102mm
Micrometer scales on all axes for repeatable positioning
Resolution: 0.01mm manual, 0.001mm motorised
DN100CF base flange with threaded holes
DN100CF top flange with threaded holes (with through holes for travels >200mm)
UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
Flanges 316LN, tube and bellows 316L stainless steel
Pressure range 1 bar – 1×10^-11 mbar
Maximum load on Z axis 40kg
Two positionable mechanical limits for the Z axis to limit the travel within its range
Options available (not listed in the table below, please ask):
- DN63CF top flange
- DN160CF or DN200CF base flange
- Base flange with through holes rather than threaded (length A increases by 35mm)
- Manual handwheel at the top instead of the bottom for handwheel version (O at end of part number, adds 35mm to length B)
- motorisation of Z axis with 2 phase stepper motor PKP 299 D 45B (Oriental) NEMA 34 / 6 Nm
- motorisation of XY axes with 2 phase stepper motor PKP268MD28B (Oriental) NEMA 23 / 2 Nm
- Linear encoder, motor encoder
- Limit switches to provide feedback if an axis reaches either end of its travel

VBMAX25 Series XYZ Manipulators - Image 2

VBMAX25 Series XYZ Manipulators - Image 3

VBMAX25 Series XYZ Manipulators - Image 4

Part No.	Travel (mm)	Length A - flange-flange (mm)	Length B (mm) see drawing	Weight (kg)	Actuation Z	Actuation XY
VBMAX25-50	50	168-218	470	36.1	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-50+
Travel (mm): 50 Length A - flange-flange (mm): 168-218 Length B (mm) see drawing: 470 Weight (kg): 36.1 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-50ZS2	50	168-218	470	40.1	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-50ZS2+
Travel (mm): 50 Length A - flange-flange (mm): 168-218 Length B (mm) see drawing: 470 Weight (kg): 40.1 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-50S2	50	168-218	470	43.1	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-50S2+
Travel (mm): 50 Length A - flange-flange (mm): 168-218 Length B (mm) see drawing: 470 Weight (kg): 43.1 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75	75	168-243	495	36.4	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75+
Travel (mm): 75 Length A - flange-flange (mm): 168-243 Length B (mm) see drawing: 495 Weight (kg): 36.4 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75ZS2	75	168-243	495	41.4	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75ZS2+
Travel (mm): 75 Length A - flange-flange (mm): 168-243 Length B (mm) see drawing: 495 Weight (kg): 41.4 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75S2	75	168-243	495	44.4	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-75S2+
Travel (mm): 75 Length A - flange-flange (mm): 168-243 Length B (mm) see drawing: 495 Weight (kg): 44.4 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100	100	168-268	520	36.7	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100+
Travel (mm): 100 Length A - flange-flange (mm): 168-268 Length B (mm) see drawing: 520 Weight (kg): 36.7 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100ZS2	100	168-268	520	42.7	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100ZS2+
Travel (mm): 100 Length A - flange-flange (mm): 168-268 Length B (mm) see drawing: 520 Weight (kg): 42.7 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100S2	100	168-268	520	45.7	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-100S2+
Travel (mm): 100 Length A - flange-flange (mm): 168-268 Length B (mm) see drawing: 520 Weight (kg): 45.7 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150	150	168-318	570	37.1	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150+
Travel (mm): 150 Length A - flange-flange (mm): 168-318 Length B (mm) see drawing: 570 Weight (kg): 37.1 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150ZS2	150	168-318	570	44.1	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150ZS2+
Travel (mm): 150 Length A - flange-flange (mm): 168-318 Length B (mm) see drawing: 570 Weight (kg): 44.1 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150S2	150	168-318	570	47.1	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-150S2+
Travel (mm): 150 Length A - flange-flange (mm): 168-318 Length B (mm) see drawing: 570 Weight (kg): 47.1 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200	200	267-467	620	34.8	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200+
Travel (mm): 200 Length A - flange-flange (mm): 267-467 Length B (mm) see drawing: 620 Weight (kg): 34.8 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200ZS2	200	267-467	620	38.8	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200ZS2+
Travel (mm): 200 Length A - flange-flange (mm): 267-467 Length B (mm) see drawing: 620 Weight (kg): 38.8 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200S2	200	267-467	620	41.8	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-200S2+
Travel (mm): 200 Length A - flange-flange (mm): 267-467 Length B (mm) see drawing: 620 Weight (kg): 41.8 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250	250	267-517	670	36.0	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250+
Travel (mm): 250 Length A - flange-flange (mm): 267-517 Length B (mm) see drawing: 670 Weight (kg): 36.0 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250ZS2	250	267-517	670	40.0	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250ZS2+
Travel (mm): 250 Length A - flange-flange (mm): 267-517 Length B (mm) see drawing: 670 Weight (kg): 40.0 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250S2	250	267-517	670	43.0	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-250S2+
Travel (mm): 250 Length A - flange-flange (mm): 267-517 Length B (mm) see drawing: 670 Weight (kg): 43.0 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300	300	267-567	720	37.2	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300+
Travel (mm): 300 Length A - flange-flange (mm): 267-567 Length B (mm) see drawing: 720 Weight (kg): 37.2 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300ZS2	300	267-567	720	41.2	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300ZS2+
Travel (mm): 300 Length A - flange-flange (mm): 267-567 Length B (mm) see drawing: 720 Weight (kg): 41.2 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300S2	300	267-567	720	44.2	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-300S2+
Travel (mm): 300 Length A - flange-flange (mm): 267-567 Length B (mm) see drawing: 720 Weight (kg): 44.2 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350	350	267-617	770	38.4	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350+
Travel (mm): 350 Length A - flange-flange (mm): 267-617 Length B (mm) see drawing: 770 Weight (kg): 38.4 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350ZS2	350	267-617	770	42.4	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350ZS2+
Travel (mm): 350 Length A - flange-flange (mm): 267-617 Length B (mm) see drawing: 770 Weight (kg): 42.4 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350S2	350	267-617	770	45.4	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-350S2+
Travel (mm): 350 Length A - flange-flange (mm): 267-617 Length B (mm) see drawing: 770 Weight (kg): 45.4 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400	400	267-667	820	39.6	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400+
Travel (mm): 400 Length A - flange-flange (mm): 267-667 Length B (mm) see drawing: 820 Weight (kg): 39.6 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400ZS2	400	267-667	820	43.6	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400ZS2+
Travel (mm): 400 Length A - flange-flange (mm): 267-667 Length B (mm) see drawing: 820 Weight (kg): 43.6 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400S2	400	267-667	820	46.6	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-400S2+
Travel (mm): 400 Length A - flange-flange (mm): 267-667 Length B (mm) see drawing: 820 Weight (kg): 46.6 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450	450	267-717	870	40.8	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450+
Travel (mm): 450 Length A - flange-flange (mm): 267-717 Length B (mm) see drawing: 870 Weight (kg): 40.8 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450ZS2	450	267-717	870	44.8	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450ZS2+
Travel (mm): 450 Length A - flange-flange (mm): 267-717 Length B (mm) see drawing: 870 Weight (kg): 44.8 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450S2	450	267-717	870	47.8	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-450S2+
Travel (mm): 450 Length A - flange-flange (mm): 267-717 Length B (mm) see drawing: 870 Weight (kg): 47.8 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500	500	277-777	930	42.0	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500+
Travel (mm): 500 Length A - flange-flange (mm): 277-777 Length B (mm) see drawing: 930 Weight (kg): 42.0 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500ZS2	500	277-777	930	46.0	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500ZS2+
Travel (mm): 500 Length A - flange-flange (mm): 277-777 Length B (mm) see drawing: 930 Weight (kg): 46.0 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500S2	500	277-777	930	49.0	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-500S2+
Travel (mm): 500 Length A - flange-flange (mm): 277-777 Length B (mm) see drawing: 930 Weight (kg): 49.0 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550	550	287-837	990	43.2	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550+
Travel (mm): 550 Length A - flange-flange (mm): 287-837 Length B (mm) see drawing: 990 Weight (kg): 43.2 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550ZS2	550	287-837	990	47.2	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550ZS2+
Travel (mm): 550 Length A - flange-flange (mm): 287-837 Length B (mm) see drawing: 990 Weight (kg): 47.2 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550S2	550	287-837	990	50.2	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-550S2+
Travel (mm): 550 Length A - flange-flange (mm): 287-837 Length B (mm) see drawing: 990 Weight (kg): 50.2 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600	600	297-897	1050	44.6	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600+
Travel (mm): 600 Length A - flange-flange (mm): 297-897 Length B (mm) see drawing: 1050 Weight (kg): 44.6 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600ZS2	600	297-897	1050	48.4	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600ZS2+
Travel (mm): 600 Length A - flange-flange (mm): 297-897 Length B (mm) see drawing: 1050 Weight (kg): 48.4 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600S2	600	297-897	1050	51.4	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-600S2+
Travel (mm): 600 Length A - flange-flange (mm): 297-897 Length B (mm) see drawing: 1050 Weight (kg): 51.4 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700	700	317-1017	1170	47.0	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700+
Travel (mm): 700 Length A - flange-flange (mm): 317-1017 Length B (mm) see drawing: 1170 Weight (kg): 47.0 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700ZS2	700	317-1017	1170	50.8	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700ZS2+
Travel (mm): 700 Length A - flange-flange (mm): 317-1017 Length B (mm) see drawing: 1170 Weight (kg): 50.8 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700S2	700	317-1017	1170	53.8	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBMAX25-700S2+
Travel (mm): 700 Length A - flange-flange (mm): 317-1017 Length B (mm) see drawing: 1170 Weight (kg): 53.8 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list

VBMAX25 Series XYZ Manipulators

Key Features

VBMAX25-50

VBMAX25-50ZS2

VBMAX25-50S2

VBMAX25-75

VBMAX25-75ZS2

VBMAX25-75S2

VBMAX25-100

VBMAX25-100ZS2

VBMAX25-100S2

VBMAX25-150

VBMAX25-150ZS2

VBMAX25-150S2

VBMAX25-200

VBMAX25-200ZS2

VBMAX25-200S2

VBMAX25-250

VBMAX25-250ZS2

VBMAX25-250S2

VBMAX25-300

VBMAX25-300ZS2

VBMAX25-300S2

VBMAX25-350

VBMAX25-350ZS2

VBMAX25-350S2

VBMAX25-400

VBMAX25-400ZS2

VBMAX25-400S2

VBMAX25-450

VBMAX25-450ZS2

VBMAX25-450S2

VBMAX25-500

VBMAX25-500ZS2

VBMAX25-500S2

VBMAX25-550

VBMAX25-550ZS2

VBMAX25-550S2

VBMAX25-600

VBMAX25-600ZS2

VBMAX25-600S2

VBMAX25-700

VBMAX25-700ZS2

VBMAX25-700S2

Vacuum System Components

Sample Preparation and Deposition

Spectroscopy

Scanning Probe Microscopy

TOF-SIMS

Quantum Transport Measurement

Electrical Probing and Failure Analysis