VBPMEGA25 Series Dual Bellows UHV XYZ Manipulators

The PMEGA25 series XYZ manipulators are available as standard with a DN160CF base flange and a DN100CF moving flange. They offer +/-25mm travel in XY and up to 600mm in Z. The smaller Z bellows has an internal diameter of 102mm and comes as standard without a support bearing, so it is suitable for very large inserts. The manipulator has a maximum 40kg load on the z axis.

Key Features


  • Z travel from 50-600mm
  • X/Y travel +/-25mm vector sum
  • Z Bellows inner diameter 102mm
  • XY Bellows inner diameter 150mm
  • Micrometer scales on all axes for repeatable positioning
  • Resolution: 0.01mm manual, 0.001mm motorised
  • DN160CF base flange with threaded holes
  • DN100CF top flange with through holes
  • UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
  • Flanges 316LN, tube and bellows 316L stainless steel
  • Pressure range 1 bar – 1×10-11 mbar
  • Maximum load on Z axis 30kg
  • One positionable mechanical limit for the Z axis to limit the travel within its range
  • Options available (not listed in the table below, please ask):
    • DN100CF top flange with threaded holes
    • DN200CF base flange
    • Alternative bolt hole orientation on base flange
    • Support bearing to fit the insert diameter
    • motorisation of Z axis with 2 phase stepper motor PK 299-E4.5B (Oriental) NEMA 34 / 6 Nm
    • motorisation of XY axes with 2 phase stepper motor PK 269 JDB (Oriental) NEMA 24 / 2.7 Nm
    • Linear encoder, motor encoder
    • Limit switches to provide feedback if an axis reaches either end of its travel
Part No.Travel (mm)Length A - flange-flange (mm)Length B (mm) see drawingWeight (kg)Actuation ZActuation XY
VBPMEGA25-5050329-37954661.7ManualManual
VBPMEGA25-50+
VBPMEGA25-50ZS250329-37954666.8MotorisedManual
VBPMEGA25-50ZS2+
VBPMEGA25-50S250329-37954668.7MotorisedMotorised
VBPMEGA25-50S2+
VBPMEGA25-100100329-42959663.2ManualManual
VBPMEGA25-100+
VBPMEGA25-100ZS2100329-42959668.3MotorisedManual
VBPMEGA25-100ZS2+
VBPMEGA25-100S2100329-42959670.2MotorisedMotorised
VBPMEGA25-100S2+
VBPMEGA25-150150379-52964664.7ManualManual
VBPMEGA25-150+
VBPMEGA25-150ZS2150379-52964669.8MotorisedManual
VBPMEGA25-150ZS2+
VBPMEGA25-150S2150379-52964671.7MotorisedMotorised
VBPMEGA25-150S2+
VBPMEGA25-200200379-57969666.2ManualManual
VBPMEGA25-200+
VBPMEGA25-200ZS2200379-57969669.8MotorisedManual
VBPMEGA25-200ZS2+
VBPMEGA25-200S2200379-57969673.2MotorisedMotorised
VBPMEGA25-200S2+
VBPMEGA25-250250379-62974667.7ManualManual
VBPMEGA25-250+
VBPMEGA25-250ZS2250379-62974671.3MotorisedManual
VBPMEGA25-250ZS2+
VBPMEGA25-250S2250379-62974674.7MotorisedMotorised
VBPMEGA25-250S2+
VBPMEGA25-300300379-67979669.2ManualManual
VBPMEGA25-300+
VBPMEGA25-300ZS2300379-67979674.3MotorisedManual
VBPMEGA25-300ZS2+
VBPMEGA25-300S2300379-67979676.2MotorisedMotorised
VBPMEGA25-300S2+
VBPMEGA25-350350379-72990170.7ManualManual
VBPMEGA25-350+
VBPMEGA25-350ZS2350379-72990175.8MotorisedManual
VBPMEGA25-350ZS2+
VBPMEGA25-350S2350379-72990177.7MotorisedMotorised
VBPMEGA25-350S2+
VBPMEGA25-400400379-77995172.2ManualManual
VBPMEGA25-400+
VBPMEGA25-400ZS2400379-77995177.3MotorisedManual
VBPMEGA25-400ZS2+
VBPMEGA25-400S2400379-77995179.2MotorisedMotorised
VBPMEGA25-400S2+
VBPMEGA25-450450399-899100173.7ManualManual
VBPMEGA25-450+
VBPMEGA25-450ZS2450399-899100178.8MotorisedManual
VBPMEGA25-450ZS2+
VBPMEGA25-450S2450399-899100180.7MotorisedMotorised
VBPMEGA25-450S2+
VBPMEGA25-500500409-909105179.2ManualManual
VBPMEGA25-500+
VBPMEGA25-500ZS2500409-909105180.3MotorisedManual
VBPMEGA25-500ZS2+
VBPMEGA25-500S2500409-909105181.8MotorisedMotorised
VBPMEGA25-500S2+
VBPMEGA25-550550419-969110180.7ManualManual
VBPMEGA25-550+
VBPMEGA25-550ZS2550419-969110181.8MotorisedManual
VBPMEGA25-550ZS2+
VBPMEGA25-550S2550419-969110183.3MotorisedMotorised
VBPMEGA25-550S2+
VBPMEGA25-600600429-1029115182.2ManualManual
VBPMEGA25-600+
VBPMEGA25-600ZS2600429-1029115183.3MotorisedManual
VBPMEGA25-600ZS2+
VBPMEGA25-600S2600429-1029115184.8MotorisedMotorised
VBPMEGA25-600S2+

VBPMEGA25-50

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VBPMEGA25-50ZS2

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VBPMEGA25-50S2

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VBPMEGA25-100

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VBPMEGA25-100ZS2

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VBPMEGA25-100S2

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VBPMEGA25-150

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VBPMEGA25-150ZS2

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VBPMEGA25-150S2

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VBPMEGA25-200

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VBPMEGA25-200ZS2

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VBPMEGA25-200S2

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VBPMEGA25-250

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VBPMEGA25-250ZS2

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VBPMEGA25-250S2

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VBPMEGA25-300

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VBPMEGA25-300ZS2

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VBPMEGA25-300S2

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VBPMEGA25-350

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VBPMEGA25-350ZS2

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VBPMEGA25-350S2

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VBPMEGA25-400

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VBPMEGA25-400ZS2

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VBPMEGA25-400S2

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VBPMEGA25-450

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VBPMEGA25-450ZS2

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VBPMEGA25-450S2

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VBPMEGA25-500

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VBPMEGA25-500ZS2

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VBPMEGA25-500S2

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VBPMEGA25-550

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VBPMEGA25-550ZS2

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VBPMEGA25-550S2

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VBPMEGA25-600

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VBPMEGA25-600ZS2

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VBPMEGA25-600S2

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