µ-FOCUS 600 NAP

The small spot monochromator µ-FOCUS 500/600 NAP is developed for XPS measurements in near ambient pressure regime. The X-ray monochromator operates according to Bragg’s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500  NAP and 600 mm for µ-FOCUS 600 NAP, respectively. Due to its overall compactness, the µ-FOCUS 500/600 NAP is suitable for mounting on almost any analysis chambers as a bolt-on component. By using the differentially pumped NAP extension with Si3Nwindow, XPS measurements under gas atmospheres of up to 30 mbar can be carried out.

Key Features


  • Spot size on the sample: between 200 µm and 1 mm
  • NAP extension with Si3N4 window for XPS measurements under gas atmospheres up to 30 mbar
  • Monochromatic Al Kα excitation with high energy resolution
  • High photon flux up to 1.9 x 1010 photons/s
  • Rowland circle with 500/600 mm
  • Pumping port for differential pumping