Environmental (NAP) XPS

Historically X-Ray Photoelectron Spectroscopy (XPS) was a technique which had to be performed in high or ultra-high vacuum (<~10-7 mbar) due to the limited path length of the electrons emitted from the sample at higher pressures. As a result of advances in the technology commercialised by our partner, SPECS, it is now possible to measure samples at pressures much closer to atmospheric pressure (<100mbar). Analysis at such pressures without pumping the analysis chamber down to HV or UHV conditions first, opens up a much wider range of samples and applications for XPS than were possible in the past. Studies of samples such as liquids, liquid-solid interfaces and samples under a background of different gases become possible. Product development of the X-Ray source technology has also allowed the analysis that would have been performed at a synchrotron in the past to be successfully performed in the customer’s own laboratory. Operating in near-ambient conditions also makes analysis of electrically insulating samples such as plastics or ceramics much easier. Samples which would become electrically charged in conventional UHV XPS are self-neutralised under such conditions. SPECS has become the market leader in this technology and offers a variety of products including a fully automated, high throughput system, the EnviroESCA, as well as systems which offer a flexible approach including UHV analysis and integration of a wide range other UHV techniques.

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Environmental (NAP) XPS

Historically X-Ray Photoelectron Spectroscopy (XPS) was a technique which had to be performed in high or ultra-high vacuum (<~10-7 mbar) due to the limited path length of the electrons emitted from the sample at higher pressures. As a result of advances in the technology commercialised by our partner, SPECS, it is now possible to measure samples at pressures much closer to atmospheric pressure (<100mbar). Analysis at such pressures without pumping the analysis chamber down to HV or UHV conditions first, opens up a much wider range of samples and applications for XPS than were possible in the past. Studies of samples such as liquids, liquid-solid interfaces and samples under a background of different gases become possible. Product development of the X-Ray source technology has also allowed the analysis that would have been performed at a synchrotron in the past to be successfully performed in the customer’s own laboratory. Operating in near-ambient conditions also makes analysis of electrically insulating samples such as plastics or ceramics much easier. Samples which would become electrically charged in conventional UHV XPS are self-neutralised under such conditions. SPECS has become the market leader in this technology and offers a variety of products including a fully automated, high throughput system, the EnviroESCA, as well as systems which offer a flexible approach including UHV analysis and integration of a wide range other UHV techniques.

Key Features


• High throughput

• Analysis of “real world” insulating and outgassing samples
• Flexibility of sample size
• Easy control of measurement conditions including temperature, pressure
• Introduction of gases and liquids to the measurement environment

Applications

Catalysis, Astrochemistry, Astrobiology, Archaeology, Food Science, Pharmaceuticals, Medical, Biomaterials, Cosmetics, Energy Storage, Materials, Devices, Electrochemistry, Soils, Minerals, Thin Films, Coatings, Polymers, Plastics, Corrosion, Microelectronics, Semiconductors

Environmental (NAP) XPS

Historically X-Ray Photoelectron Spectroscopy (XPS) was a technique which had to be performed in high or ultra-high vacuum (<~10-7 mbar) due to the limited path length of the electrons emitted from the sample at higher pressures. As a result of advances in the technology commercialised by our partner, SPECS, it is now possible to measure samples at pressures much closer to atmospheric pressure (<100mbar). Analysis at such pressures without pumping the analysis chamber down to HV or UHV conditions first, opens up a much wider range of samples and applications for XPS than were possible in the past. Studies of samples such as liquids, liquid-solid interfaces and samples under a background of different gases become possible. Product development of the X-Ray source technology has also allowed the analysis that would have been performed at a synchrotron in the past to be successfully performed in the customer’s own laboratory. Operating in near-ambient conditions also makes analysis of electrically insulating samples such as plastics or ceramics much easier. Samples which would become electrically charged in conventional UHV XPS are self-neutralised under such conditions. SPECS has become the market leader in this technology and offers a variety of products including a fully automated, high throughput system, the EnviroESCA, as well as systems which offer a flexible approach including UHV analysis and integration of a wide range other UHV techniques.

Key Features


• High throughput

• Analysis of “real world” insulating and outgassing samples
• Flexibility of sample size
• Easy control of measurement conditions including temperature, pressure
• Introduction of gases and liquids to the measurement environment

Applications

Catalysis, Astrochemistry, Astrobiology, Archaeology, Food Science, Pharmaceuticals, Medical, Biomaterials, Cosmetics, Energy Storage, Materials, Devices, Electrochemistry, Soils, Minerals, Thin Films, Coatings, Polymers, Plastics, Corrosion, Microelectronics, Semiconductors

EnviroMETROS is a unique metrology platform for the chemical analysis of ultrathin films and 2D materials that allows a detailed characterisation of stoichiometries‚ composition and depth distribution of elements. The system combines XPS with an array of optional techniques such as HAXPES, UPS, IPES, AES, REELS, Raman and Infrared spectroscopies. These techniques can be employed on the same sample spot. It can optionally be configured for NAP XPS, but the base model is a UHV load-locked system. Depending on the system configuration, it can be set up for 80x80mm samples or 8″ or 12″ wafers.

 

This novel and smart analysis tool overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV. EnviroESCA is designed from the ground up for high-throughput analysis and opens up new applications in the fields of medical technology, biotechnology and the life sciences.

It offers the shortest loading-to-measurement time on samples of all types including liquids, tissue, plastics and foils, powders, soil, zeolites, rocks, minerals and ceramics

The SPECS ProvenX NAP is available with backfilling configuration or with In-Situ Cell (DeviSIM, like a small compact reactor). It is a performance optimised system for state of the art NAP-XPS as well as NAP-UPS measurements from UHV up to 30 mbar pressure range. It contains a PHOIBOS 150 NAP analyser with unsurpassed transmission and angular acceptance, a high performance small spot monochromatic X-ray source µ-FOCUS 600 NAP, a 4-axes manipulator or DeviSIM with NAP different heating capabilities as well as an optional non-monochromatic UV source UVS 300 NAP.

Highest transmission wide angle hemispherical energy analyser with 60° acceptance angle, and AD-CMOS detector for photo electron spectroscopy measurements (XPS and UPS) and angular resolved studies (ARXPS) in the pressure regime from UHV to near ambient pressure (NAP upgradable). With this analyser NAP-HAXPES measurements up to 10 keV can be performed.

This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR-MC micro-focus X-ray source is perfectly suited for small spot, high resolution, and high intensity XPS measurements. The X-ray monochromator operates according to Bragg’s Law of X-ray diffraction. Each wavelength of X-rays (Al Kα, Ag Lα, Cr Kα) is reflected from individually optimized crystals at a specific angle of reflection. For the Al and Ag anodes, quartz crystal are used, which have a 450 mm and 416 mm Rowland circle diameter respectively , whereas for Cr germanium crystals are used with a 676 mm Rowland circle. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si3N4 window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.

The small spot monochromator µ-FOCUS 500/600 NAP is developed for XPS measurements in near ambient pressure regime. The X-ray monochromator operates according to Bragg’s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500  NAP and 600 mm for µ-FOCUS 600 NAP, respectively. Due to its overall compactness, the µ-FOCUS 500/600 NAP is suitable for mounting on almost any analysis chambers as a bolt-on component. By using the differentially pumped NAP extension with Si3Nwindow, XPS measurements under gas atmospheres of up to 30 mbar can be carried out.

DeviSim NAP is a reactor cell of 400 ml volume at near ambient pressure conditions that can directly be coupled to the PHOIBOS 150 NAP. It is built on a manipulator which is docked into the UHV analysis chamber with PHOIBOS 150 NAP analyser. It designed for a fast sample transfer. The cell includes a gas inlet system suitable for a wide range of gases. The sample heating mechanism allows for heating up to 600 °C at 20 mbar of N2 pressure and cooling with liquid Nitrogen down to at least 200 K and a gas handling system.

For many years, the Phoibos-series analysers have formed the cornerstone of the SPECS analyser product range and as such are well proven in the field. Depending on configuration, the Phoibos series can be adapted for XPS, UPS, ARPES, HAXPES, NAP XPS or ISS. It comes in three possible hemisphere sizes: 100, 150 and 225mm and a range of 1D and 2D detectors including 1D and 2D delayline, 2D-CCD and AD-CMOS. Acceptance angles of +/-15º are standard.