EnviroMETROS
EnviroMETROS is a unique metrology platform for the chemical analysis of ultrathin films and 2D materials that allows a detailed characterisation of stoichiometries‚ composition and depth distribution of elements. The system combines XPS with an array of optional techniques such as HAXPES, UPS, IPES, AES, REELS, Raman and Infrared spectroscopies. These techniques can be employed on the same sample spot. It can optionally be configured for NAP XPS, but the base model is a UHV load-locked system. Depending on the system configuration, it can be set up for 80x80mm samples or 8″ or 12″ wafers.
Key Features
- Metrology with ultimate stability, reliability and repeatability;
- Precise chemical and dimensional quantification
- Short acquisition times (high sensitivites and throughput)
- Non-destructive depth profiling using different photon energies in combination with angle resolved XPS (ARXPS)
- Flexible analysis area (100 µm to 1 mm)
- Integration of supplementary optical metrology (IRRAS and Raman)
- Electronic structure analysis by combined UPS and IPES
- Identification of energy loss mechanisms by REELS
- Option to operate the system in UHV or NAP environment
- Fully Software Controlled
