µFOCUS 500/600

The µFOCUS 500/600 monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. The small spot monochromator µFOCUS 500/600 operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. A moveable aluminised polymer window (shutter) is provided on the monochromator housing for differential pumping or to shield the crystal assembly during sputtering

SPECS

Key Features


 

  • Spot size on the sample: between 200 µm and 1 mm
  • Monochromatic Al Kα excitation with high energy resolution for most demanding XPS measurements
  • High photon flux up to 2 x 1010 photons/s
  • Rowland circle with 500/600 mm
  • Pumping port for differential pumping
µFOCUS 500/600

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