X-Ray Photoelectron Spectroscopy (XPS)

XPS or X-Ray Photoelectron Spectroscopy is a well-established quantitative surface-sensitive analysis technique. It is sometimes also known as ESCA (electron spectroscopy for chemical analysis). Quantitative Information can be obtained on the surface elemental composition as well as the chemical state of the atoms that are present. In order to obtain XPS spectra, the sample is irradiated with (often monochromatic) X-rays and the characteristic energy of the emitted photoelectrons is measured.

Our product range includes complete turn-XPS systems from our partner, SPECS. These systems can be highly automated and standardised, but can also be customised according to customer requirements.  Given the large number of XPS systems already in the field, there is also a considerable market for upgrade of retrofittable components such as X-ray sources and analysers.

For more information

Contact Us

X-Ray Photoelectron Spectroscopy (XPS)

XPS or X-Ray Photoelectron Spectroscopy is a well-established quantitative surface-sensitive analysis technique. It is sometimes also known as ESCA (electron spectroscopy for chemical analysis). Quantitative Information can be obtained on the surface elemental composition as well as the chemical state of the atoms that are present. In order to obtain XPS spectra, the sample is irradiated with (often monochromatic) X-rays and the characteristic energy of the emitted photoelectrons is measured.

Our product range includes complete turn-XPS systems from our partner, SPECS. These systems can be highly automated and standardised, but can also be customised according to customer requirements.  Given the large number of XPS systems already in the field, there is also a considerable market for upgrade of retrofittable components such as X-ray sources and analysers.

Key Features


Our product range includes

  • Complete systems
  • hemispherical analysers
  • X-ray sources (monochromated and unmonochromated)
  • electron sources for charge neutralisation (flood guns)

X-Ray Photoelectron Spectroscopy (XPS)

XPS or X-Ray Photoelectron Spectroscopy is a well-established quantitative surface-sensitive analysis technique. It is sometimes also known as ESCA (electron spectroscopy for chemical analysis). Quantitative Information can be obtained on the surface elemental composition as well as the chemical state of the atoms that are present. In order to obtain XPS spectra, the sample is irradiated with (often monochromatic) X-rays and the characteristic energy of the emitted photoelectrons is measured.

Our product range includes complete turn-XPS systems from our partner, SPECS. These systems can be highly automated and standardised, but can also be customised according to customer requirements.  Given the large number of XPS systems already in the field, there is also a considerable market for upgrade of retrofittable components such as X-ray sources and analysers.

Key Features


Our product range includes

  • Complete systems
  • hemispherical analysers
  • X-ray sources (monochromated and unmonochromated)
  • electron sources for charge neutralisation (flood guns)

EnviroMETROS

EnviroMETROS is a unique metrology platform for the chemical analysis of ultrathin films and 2D materials that allows a detailed characterisation of stoichiometries‚ composition and depth distribution of elements. The system combines XPS with an array of optional techniques such as HAXPES, UPS, IPES, AES, REELS, Raman and Infrared spectroscopies. These techniques can be employed on the same sample spot. It can optionally be configured for NAP XPS, but the base model is a UHV load-locked system. Depending on the system configuration, it can be set up for 80x80mm samples or 8″ or 12″ wafers.

 

View Product

ProvenX-PS XPS System

The ProvenX-PS system is a dedicated XPS/UPS system, equipped with PHOIBOS 150 electron analyser with ultra-fast 128 channel delay-line detector with snapshot capability, FOCUS 500 dual anode monochromated X-ray source and optional UVS 10 high-flux UV source. The system comes with a clean UHV sample storage facility and a multi sample fast entry loadlock and can be additionally equipped with a dedicated preparation chamber as well as HPC 20 high pressure cell.

View Product

AEOLOS 150 Analyser

Highest transmission wide angle hemispherical energy analyser with 60° acceptance angle, and AD-CMOS detector for photo electron spectroscopy measurements (XPS and UPS) and angular resolved studies (ARXPS) in the pressure regime from UHV to near ambient pressure (NAP upgradable). With this analyser NAP-HAXPES measurements up to 10 keV can be performed.

View Product

µFOCUS 450

This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR-MC micro-focus X-ray source is perfectly suited for small spot, high resolution, and high intensity XPS measurements. The X-ray monochromator operates according to Bragg’s Law of X-ray diffraction. Each wavelength of X-rays (Al Kα, Ag Lα, Cr Kα) is reflected from individually optimized crystals at a specific angle of reflection. For the Al and Ag anodes, quartz crystal are used, which have a 450 mm and 416 mm Rowland circle diameter respectively , whereas for Cr germanium crystals are used with a 676 mm Rowland circle. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si3N4 window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.

View Product

µFOCUS 500/600

The µFOCUS 500/600 monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. The small spot monochromator µFOCUS 500/600 operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. A moveable aluminised polymer window (shutter) is provided on the monochromator housing for differential pumping or to shield the crystal assembly during sputtering

View Product

XR50 Dual Anode X-Ray Source

The XR 50 is a high intensity twin anode X-ray source optimised for XPS experiments. The anode is made of silver to avoid any CuLα breakthrough. Due to the use of dual anodes it is possible to switch between two different incident energies without the need to vent the system. Dual anodes with different material coatings are available on request including Al, Mg, Ag, Cr, Zr. The electron optical design of the anode, filament and source housing guarantees maximum X-ray intensity and very low crosstalk between the anode faces.

View Product

FG 22/35 Flood Gun

The FG 22/35 is a compact, easy to handle, reliable flood gun for charge neutralisation of positively-charged insulators or semiconductors. It allows operation in the energy range of 0 – 500 eV for charge compensation in typical XPS/AES and SIMS experiments, respectively.

View Product

Phoibos Series Hemispherical Analysers

For many years, the Phoibos-series analysers have formed the cornerstone of the SPECS analyser product range and as such are well proven in the field. Depending on configuration, the Phoibos series can be adapted for XPS, UPS, ARPES, HAXPES, NAP XPS or ISS. It comes in three possible hemisphere sizes: 100, 150 and 225mm and a range of 1D and 2D detectors including 1D and 2D delayline, 2D-CCD and AD-CMOS. Acceptance angles of +/-15º are standard.

View Product