ProvenX-PS XPS System

The ProvenX-PS system is a dedicated XPS/UPS system, equipped with PHOIBOS 150 electron analyser with ultra-fast 128 channel delay-line detector with snapshot capability, FOCUS 500 dual anode monochromated X-ray source and optional UVS 10 high-flux UV source. The system comes with a clean UHV sample storage facility and a multi sample fast entry loadlock and can be additionally equipped with a dedicated preparation chamber as well as HPC 20 high pressure cell.

Key Features


  • PHOIBOS 150 energy analyzer with up to +/-15° acceptance angle
  • Energy Resolution <2 meV
  • High-performance dual anode monochromatic X-ray source FOCUS 500 with Al Kα and Ag Lα anode
  • 4-axes sample manipulator with e-beam heating and LN2 cooling
  • Analysis module with base pressure < 5×10-10 mbar
  • Optional small spot X-Ray source with < 250 µm
  • Optional UV source UVS 10/35 for UPS measurements
  • SpecsLab Prodigy Software Suite
  • Vacuum control software for system operation