EQ22/35 Electron Source

This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.

Key Features


  • Wide energy range
  • High electron current
  • Small spot size
  • Integrated beam deflection
  • Key stone correction
  • Optional pulse mode
Operation
Electron Current > 100 μA
Electron Energy 20 eV – 5 keV
Scannable yes
Applications AES, SEM, SAM, REELS
Optional Accessories  

  • Microformed filament (LaB6)
  • Pulsed operation with beam chopper

 

Performance
Scan Range ±5 mm at 32 mm
Spot Size 50 μm at 5 kV
Mounting
Mounting Flange DN35CF (2.75”)
Insertion Depth 166 mm
Working Distance 20 mm