EQ22/35 Electron Source
This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.
Key Features
- Wide energy range
- High electron current
- Small spot size
- Integrated beam deflection
- Key stone correction
- Optional pulse mode
Operation
| Electron Current | > 100 μA |
| Electron Energy | 20 eV – 5 keV |
| Scannable | yes |
| Applications | AES, SEM, SAM, REELS |
| Optional Accessories |
|
Performance
| Scan Range | ±5 mm at 32 mm |
| Spot Size | 50 μm at 5 kV |
Mounting
| Mounting Flange | DN35CF (2.75”) |
| Insertion Depth | 166 mm |
| Working Distance | 20 mm |











