Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy utilises a high energy, small spot electron beam to excite surface electrons from the top 3-10nm of the sample. Atoms that are excited by the primary electron beam can relax by the emission of electrons known as Auger electrons. The energy of these emitted electrons is characteristic of the elements present at the surface. The smaller spot size of the electron beams used for Auger analysis mean that the technique can be well suited to imaging applications.

With our partner, SPECS, we offer a small spot size electron source as well as hemispherical analysers that can equally well perform Auger measurements as they can XPS. Auger electron spectroscopy is also integrated into some of our complete systems.

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Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy utilises a high energy, small spot electron beam to excite surface electrons from the top 3-10nm of the sample. Atoms that are excited by the primary electron beam can relax by the emission of electrons known as Auger electrons. The energy of these emitted electrons is characteristic of the elements present at the surface. The smaller spot size of the electron beams used for Auger analysis mean that the technique can be well suited to imaging applications.

With our partner, SPECS, we offer a small spot size electron source as well as hemispherical analysers that can equally well perform Auger measurements as they can XPS. Auger electron spectroscopy is also integrated into some of our complete systems.

Key Features


  • High spatial resolution surface chemical analysis

Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy utilises a high energy, small spot electron beam to excite surface electrons from the top 3-10nm of the sample. Atoms that are excited by the primary electron beam can relax by the emission of electrons known as Auger electrons. The energy of these emitted electrons is characteristic of the elements present at the surface. The smaller spot size of the electron beams used for Auger analysis mean that the technique can be well suited to imaging applications.

With our partner, SPECS, we offer a small spot size electron source as well as hemispherical analysers that can equally well perform Auger measurements as they can XPS. Auger electron spectroscopy is also integrated into some of our complete systems.

Key Features


  • High spatial resolution surface chemical analysis

EQ22/35 Electron Source

This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.

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Phoibos Series Hemispherical Analysers

For many years, the Phoibos-series analysers have formed the cornerstone of the SPECS analyser product range and as such are well proven in the field. Depending on configuration, the Phoibos series can be adapted for XPS, UPS, ARPES, HAXPES, NAP XPS or ISS. It comes in three possible hemisphere sizes: 100, 150 and 225mm and a range of 1D and 2D detectors including 1D and 2D delayline, 2D-CCD and AD-CMOS. Acceptance angles of +/-15º are standard.

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Low Energy Electron Diffraction (LEED) with optional Auger Electron Spectroscopy (AES)

Low Energy Electron Diffraction (LEED) is one of the most powerful methods to determine surface structures. Analysis of LEED patterns and intensities provides the size and shape of the surface unit cell, the degree of order and detailed atomic structure with a precision of the order of picometers. Our LEED optics also enable Auger Electron Spectroscopy (AES) when equipped with the appropriate (optional) control unit. AES is a technique to provide chemical analysis of the surface. Our LEED optics are available in two flange sizes, DN100CF and DN150CF. We recommend the largest possible flange size if the chamber allows it, as larger screen sizes much are easier to work with and the cost saving for the smaller optics is minimal.

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