Mini MBE System
The CreaTec MiniMBE System is specially designed for Molecular Beam Epitaxy growth on small, typically flag style, samples in combination with a reduced size of the system compared to typical MBE systems. The system still has space to accommodate up to 11 effusion cells around a larger central port for a plasma source or e-beam evaporator. The small chamber size compared to typical MBE systems has advantages for ease of integration with other systems, less lab floor space and of course lower running costs.
Key Features
- Optimized pumping configuration
- Face-down zero force substrate transfer
- Linear shutters and substrate rotation, specified for millions of cycles
- Substrate heater option available
- Up to 11 effusion cells
- CF 63 central multifunctional port (e.g., standard sources)
- Main shutter
- Flux gauge / QCM
- RHEED
- Automated batch processing
