VBPMAKRO25 Series Dual Bellows UHV XYZ Manipulators
The VBPMAKRO25 series XYZ manipulators are available as standard with a DN200CF base flange and a DN160CF moving flange. They offer +/-25mm travel in XY and up to 600mm in Z. The smaller Z bellows has an internal diameter of 150mm and comes as standard without a support bearing, so it is suitable for very large inserts. The manipulator has a maximum 40kg load on the z axis and is only available fully motorised.
Key Features
- Z travel from 50-600mm
- X/Y travel +/-25mm vector sum
- Z Bellows inner diameter 150mm
- motorised Z axis with 2 phase stepper motor PKP 299 D45B (Orien tal) NEMA 34 / 6 Nm
- motorised XY axes with 2 phase stepper motor PKP 299 D45B (Orien tal) NEMA 34 / 6 Nm
- Micrometer scales on all axes for repeatable positioning
- Resolution:0.001mm
- DN200CF base flange with threaded holes
- DN160CF top flange with threaded holes
- UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
- Flanges 316LN, tube and bellows 316L stainless steel
- Pressure range 1 bar – 1×10-11 mbar
- Maximum load on Z axis 30kg
- One positionable mechanical limit for the Z axis to limit the travel within its range
- Options available (not listed in the table below, please ask):
- DN100CF top flange with through holes
- DN250CF base flange
- Alternative bolt hole orientation on base flange
- Support bearing to fit the insert diameter
- Linear encoder, motor encoder
- Limit switches to provide feedback if an axis reaches either end of its travel
| Part No. | Travel (mm) | Length A - flange-flange (mm) | Length B (mm) see drawing | Weight (kg) | |
|---|---|---|---|---|---|
| VBPMAKRO25-50S2 | 50 | 210-260 | 513 | 62.5 | |
| VBPMAKRO25-50S2 | |||||
| VBPMAKRO25-75S2 | 75 | 210-285 | 538 | 63.5 | |
| VBPMAKRO25-75S2 | |||||
| VBPMAKRO25-100S2 | 100 | 210-310 | 563 | 64.0 | |
| VBPMAKRO25-100S2 | |||||
| VBPMAKRO25-150S2 | 150 | 309-459 | 613 | 65.5 | |
| VBPMAKRO25-150S2 | |||||
| VBPMAKRO25-200S2 | 200 | 309-509 | 663 | 67.0 | |
| VBPMAKRO25-200S2 | |||||
| VBPMAKRO25-250S2 | 250 | 309-559 | 713 | 68.5 | |
| VBPMAKRO25-250S2 | |||||
| VBPMAKRO25-300S2 | 300 | 309-609 | 763 | 69.0 | |
| VBPMAKRO25-300S2 | |||||
| VBPMAKRO25-400S2 | 400 | 309-709 | 863 | 71.0 | |
| VBPMAKRO25-400S2 | |||||
| VBPMAKRO25-450S2 | 450 | 309-759 | 913 | 72.5 | |
| VBPMAKRO25-450S2 | |||||
| VBPMAKRO25-500S2 | 500 | 319-819 | 973 | 75.0 | |
| VBPMAKRO25-500S2 | |||||
| VBPMAKRO25-550S2 | 550 | 329-879 | 1033 | 77.5 | |
| VBPMAKRO25-550S2 | |||||
| VBPMAKRO25-600S2 | 600 | 339-939 | 1093 | 80.0 | |
| VBPMAKRO25-600S2 |
