VBPMAX25 Series Dual Bellows UHV XYZ Manipulators

The PMAX25 series XYZ manipulators are available as standard with a DN100CF base flange and a DN63CF moving flange. They offer +/-25mm travel in XY and up to 600mm in Z. The smaller Z bellows has an internal diameter of 66mm and comes as standard without a support bearing. The larger inner and outer diameter compared to the PM series mean that larger inserts are possible The manipulator has a maximum 30kg load on the z axis.

Key Features


  • Z travel from 50-600mm
  • X/Y travel +/-25mm vector sum
  • Z Bellows inner diameter 66mm
  • XY Bellows inner diameter 102mm
  • Micrometer scales on all axes for repeatable positioning
  • Resolution: 0.01mm manual, 0.001mm motorised
  • DN100CF base flange with threaded holes
  • DN63CF top flange with through holes
  • UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
  • Flanges 316LN, tube and bellows 316L stainless steel
  • Pressure range 1 bar – 1×10-11 mbar
  • Maximum load on Z axis 30kg
  • One positionable mechanical limit for the Z axis to limit the travel within its range
  • Options available (not listed in the table below, please ask):
    • DN63CF top flange with threaded holes
    • DN160CF or DN200CF base flange
    • Alternative bolt hole orientation on base flange
    • Support bearing to fit the insert diameter
    • motorisation of Z axis with 2 phase stepper motor PK 299-E4.5B (Oriental) NEMA 34 / 6 Nm
    • motorisation of XY axes with 2 phase stepper motor PKP268MD28B (Oriental) NEMA 23 / 2 Nm
    • Linear encoder, motor encoder
    • Limit switches to provide feedback if an axis reaches either end of its travel
Part No.Travel (mm)Length A - flange-flange (mm)Length B (mm) see drawingWeight (kg)Actuation ZActuation XY
VBPMAX25-5050294-34454838.4ManualManual
VBPMAX25-50+
VBPMAX25-50ZS250294-34454838.9MotorisedManual
VBPMAX25-50ZS2+
VBPMAX25-50S250294-34454845.7MotorisedMotorised
VBPMAX25-50S2+
VBPMAX25-100100294-39459839.0ManualManual
VBPMAX25-100+
VBPMAX25-100ZS2100294-39459844.5MotorisedManual
VBPMAX25-100ZS2+
VBPMAX25-100S2100294-39459846.3MotorisedMotorised
VBPMAX25-100S2+
VBPMAX25-150150294-44464839.6ManualManual
VBPMAX25-150+
VBPMAX25-150ZS2150294-44464845.1MotorisedManual
VBPMAX25-150ZS2+
VBPMAX25-150S2150294-44464846.9MotorisedMotorised
VBPMAX25-150S2+
VBPMAX25-200200294-49469840.2ManualManual
VBPMAX25-200+
VBPMAX25-200ZS2200294-49469845.7MotorisedManual
VBPMAX25-200ZS2+
VBPMAX25-200S2200294-49469847.5MotorisedMotorised
VBPMAX25-200S2+
VBPMAX25-250250294-54474840.8ManualManual
VBPMAX25-250+
VBPMAX25-250ZS2250294-54474846.3MotorisedManual
VBPMAX25-250ZS2+
VBPMAX25-250S2250294-54474848.1MotorisedMotorised
VBPMAX25-250S2+
VBPMAX25-300300294-59479841.4ManualManual
VBPMAX25-300+
VBPMAX25-300ZS2300294-59479846.9MotorisedManual
VBPMAX25-300ZS2+
VBPMAX25-300S2300294-59479848.7MotorisedMotorised
VBPMAX25-300S2+
VBPMAX25-350350344-69490342.0ManualManual
VBPMAX25-350+
VBPMAX25-350ZS2350344-69490347.5MotorisedManual
VBPMAX25-350ZS2+
VBPMAX25-350S2350344-69490349.3MotorisedMotorised
VBPMAX25-350S2+
VBPMAX25-400400344-74495342.6ManualManual
VBPMAX25-400+
VBPMAX25-400ZS2400344-74495342.1MotorisedManual
VBPMAX25-400ZS2+
VBPMAX25-400S2400344-74495349.9MotorisedMotorised
VBPMAX25-400S2+
VBPMAX25-450450344-794100343.2ManualManual
VBPMAX25-450+
VBPMAX25-450ZS2450344-794100342.7MotorisedManual
VBPMAX25-450ZS2+
VBPMAX25-450S2450344-794100350.5MotorisedMotorised
VBPMAX25-450S2+
VBPMAX25-500500354-854105343.8ManualManual
VBPMAX25-500+
VBPMAX25-500ZS2500354-854105343.3MotorisedManual
VBPMAX25-500ZS2+
VBPMAX25-500S2500354-854105351.1MotorisedMotorised
VBPMAX25-500S2+
VBPMAX25-550550364-914111344.4ManualManual
VBPMAX25-550+
VBPMAX25-550ZS2550364-914111343.9MotorisedManual
VBPMAX25-550ZS2+
VBPMAX25-550S2550364-914111351.7MotorisedMotorised
VBPMAX25-550S2+
VBPMAX25-600600374-924117345.0ManualManual
VBPMAX25-600+
VBPMAX25-600ZS2600374-924117344.5MotorisedManual
VBPMAX25-600ZS2+
VBPMAX25-600S2600374-924117352.3MotorisedMotorised
VBPMAX25-600S2+

VBPMAX25-50

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VBPMAX25-50ZS2

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VBPMAX25-50S2

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VBPMAX25-100

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VBPMAX25-100ZS2

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VBPMAX25-100S2

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VBPMAX25-150

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VBPMAX25-150ZS2

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VBPMAX25-150S2

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VBPMAX25-200

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VBPMAX25-200ZS2

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VBPMAX25-200S2

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VBPMAX25-250

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VBPMAX25-250ZS2

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VBPMAX25-250S2

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VBPMAX25-300

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VBPMAX25-300ZS2

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VBPMAX25-300S2

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VBPMAX25-350

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VBPMAX25-350ZS2

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VBPMAX25-350S2

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VBPMAX25-400

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VBPMAX25-400ZS2

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VBPMAX25-400S2

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VBPMAX25-450

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VBPMAX25-450ZS2

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VBPMAX25-450S2

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VBPMAX25-500

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VBPMAX25-500ZS2

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VBPMAX25-500S2

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VBPMAX25-550

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VBPMAX25-550ZS2

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VBPMAX25-550S2

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VBPMAX25-600

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VBPMAX25-600ZS2

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VBPMAX25-600S2

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