VBPMM12 Series XYZ Manipulators

The PMM12 series is single bellows XYZ manipulator available as standard with a DN63CF base flange (DN100CF or DN160CF by request), and a DN63CF moving flange (DN40CF by request). With a 70.5mm inner diameter of the bellows, to obtain the full +/-12.5mm XY travel, the sample stage support rod and any associated wiring must be 45.5mm diameter or less. The manipulator can be supplied with all axes manually-operated, motorised Z axis or with all 3 axes motorised. Z travels are available from 50-600mm. The manipulator has a maximum 20kg load on the z axis.

Key Features

Z travel from 50-600mm in 50mm increments
X/Y travel +/-12.5mm vector sum
Bellows inner diameter 70.5mm
Micrometer scales on all axes for repeatable positioning
Resolution: 0.01mm manual, 0.001mm motorised
DN63CF base flange with through holes
DN63CF top flange with threaded holes
UHV compatible, bakeout up to 230ºC (motors have to be removed if motorised)
Flanges 316LN, tube and bellows 316L stainless steel
Pressure range 1 bar – 1×10^-11 mbar
Two positionable mechanical limits for the Z axis to limit the travel within its range
Maximum load on Z axis 20kg
Options available (not listed in the table below, please ask):
- DN63CF top flange with through holes instead of threaded (add TD at end of part number, adds 40mm to length A)
- DN40CF top flange with threaded holes instead of DN63CF with threaded holes
- DN100CF or DN160CF base flange
- motorisation with 2 phase stepper motor PKP268MD28B (Oriental) NEMA 23 / 2 Nm
- Linear encoder, motor encoder
- Limit switches to provide feedback if an axis reaches either end of its travel

VBPMM12 Series XYZ Manipulators - Image 2

VBPMM12 Series XYZ Manipulators - Image 3

VBPMM12 Series XYZ Manipulators - Image 4

Part No.	Travel (mm)	Length A - flange-flange (mm)	Length B (mm) see drawing	Length C (mm) see drawing	Weight (kg)	Actuation Z	Actuation XY
VBPMM12-50	50	216-266	346		17.4	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-50+
Travel (mm): 50 Length A - flange-flange (mm): 216-266 Length B (mm) see drawing: 346 Length C (mm) see drawing: Weight (kg): 17.4 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-50ZS2	50	216-266		330	19.4	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-50ZS2+
Travel (mm): 50 Length A - flange-flange (mm): 216-266 Length B (mm) see drawing: Length C (mm) see drawing: 330 Weight (kg): 19.4 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-50S2	50	216-266		330	23.4	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-50S2+
Travel (mm): 50 Length A - flange-flange (mm): 216-266 Length B (mm) see drawing: Length C (mm) see drawing: 330 Weight (kg): 23.4 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100	100	216-316	396		18.0	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100+
Travel (mm): 100 Length A - flange-flange (mm): 216-316 Length B (mm) see drawing: 396 Length C (mm) see drawing: Weight (kg): 18.0 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100ZS2	100	216-316		380	20.0	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100ZS2+
Travel (mm): 100 Length A - flange-flange (mm): 216-316 Length B (mm) see drawing: Length C (mm) see drawing: 380 Weight (kg): 20.0 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100S2	100	216-316		380	24.0	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-100S2+
Travel (mm): 100 Length A - flange-flange (mm): 216-316 Length B (mm) see drawing: Length C (mm) see drawing: 380 Weight (kg): 24.0 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150	150	226-376	456		18.7	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150+
Travel (mm): 150 Length A - flange-flange (mm): 226-376 Length B (mm) see drawing: 456 Length C (mm) see drawing: Weight (kg): 18.7 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150ZS2	150	226-376		440	16.9	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150ZS2+
Travel (mm): 150 Length A - flange-flange (mm): 226-376 Length B (mm) see drawing: Length C (mm) see drawing: 440 Weight (kg): 16.9 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150S2	150	226-376		440	20.9	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-150S2+
Travel (mm): 150 Length A - flange-flange (mm): 226-376 Length B (mm) see drawing: Length C (mm) see drawing: 440 Weight (kg): 20.9 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200	200	236-436	516		19.3	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200+
Travel (mm): 200 Length A - flange-flange (mm): 236-436 Length B (mm) see drawing: 516 Length C (mm) see drawing: Weight (kg): 19.3 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200ZS2	200	236-436		500	17.6	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200ZS2+
Travel (mm): 200 Length A - flange-flange (mm): 236-436 Length B (mm) see drawing: Length C (mm) see drawing: 500 Weight (kg): 17.6 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200S2	200	236-436		500	21.6	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-200S2+
Travel (mm): 200 Length A - flange-flange (mm): 236-436 Length B (mm) see drawing: Length C (mm) see drawing: 500 Weight (kg): 21.6 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250	250	246-496	576		20.0	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250+
Travel (mm): 250 Length A - flange-flange (mm): 246-496 Length B (mm) see drawing: 576 Length C (mm) see drawing: Weight (kg): 20.0 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250ZS2	250	246-496		560	18.3	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250ZS2+
Travel (mm): 250 Length A - flange-flange (mm): 246-496 Length B (mm) see drawing: Length C (mm) see drawing: 560 Weight (kg): 18.3 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250S2	250	246-496		560	22.3	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-250S2+
Travel (mm): 250 Length A - flange-flange (mm): 246-496 Length B (mm) see drawing: Length C (mm) see drawing: 560 Weight (kg): 22.3 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300	300	256-556	636		20.6	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300+
Travel (mm): 300 Length A - flange-flange (mm): 256-556 Length B (mm) see drawing: 636 Length C (mm) see drawing: Weight (kg): 20.6 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300ZS2	300	256-556		620	19.0	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300ZS2+
Travel (mm): 300 Length A - flange-flange (mm): 256-556 Length B (mm) see drawing: Length C (mm) see drawing: 620 Weight (kg): 19.0 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300S2	300	256-556		620	26.6	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-300S2+
Travel (mm): 300 Length A - flange-flange (mm): 256-556 Length B (mm) see drawing: Length C (mm) see drawing: 620 Weight (kg): 26.6 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-350ZS2	350	276-576		690	19.7	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-350ZS2+
Travel (mm): 350 Length A - flange-flange (mm): 276-576 Length B (mm) see drawing: Length C (mm) see drawing: 690 Weight (kg): 19.7 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-350S2	350	276-576		690	27.3	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-350S2+
Travel (mm): 350 Length A - flange-flange (mm): 276-576 Length B (mm) see drawing: Length C (mm) see drawing: 690 Weight (kg): 27.3 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400	400	286-686	766		21.9	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400+
Travel (mm): 400 Length A - flange-flange (mm): 286-686 Length B (mm) see drawing: 766 Length C (mm) see drawing: Weight (kg): 21.9 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400ZS2	400	286-686		750	20.4	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400ZS2+
Travel (mm): 400 Length A - flange-flange (mm): 286-686 Length B (mm) see drawing: Length C (mm) see drawing: 750 Weight (kg): 20.4 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400S2	400	286-686		750	24.4	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-400S2+
Travel (mm): 400 Length A - flange-flange (mm): 286-686 Length B (mm) see drawing: Length C (mm) see drawing: 750 Weight (kg): 24.4 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500	500	316-816	896		23.2	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500+
Travel (mm): 500 Length A - flange-flange (mm): 316-816 Length B (mm) see drawing: 896 Length C (mm) see drawing: Weight (kg): 23.2 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500ZS2	500	316-816		880	21.8	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500ZS2+
Travel (mm): 500 Length A - flange-flange (mm): 316-816 Length B (mm) see drawing: Length C (mm) see drawing: 880 Weight (kg): 21.8 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500S2	500	316-816		880	25.8	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-500S2+
Travel (mm): 500 Length A - flange-flange (mm): 316-816 Length B (mm) see drawing: Length C (mm) see drawing: 880 Weight (kg): 25.8 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600	600	346-946	1026		24.5	Manual	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600+
Travel (mm): 600 Length A - flange-flange (mm): 346-946 Length B (mm) see drawing: 1026 Length C (mm) see drawing: Weight (kg): 24.5 Actuation Z: Manual Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600ZS2	600	346-946		1010	23.2	Motorised	Manual	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600ZS2+
Travel (mm): 600 Length A - flange-flange (mm): 346-946 Length B (mm) see drawing: Length C (mm) see drawing: 1010 Weight (kg): 23.2 Actuation Z: Motorised Actuation XY: Manual Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600S2	600	346-946		1010	27.2	Motorised	Motorised	Add to quote This product is already in your quote request list. Browse the list
VBPMM12-600S2+
Travel (mm): 600 Length A - flange-flange (mm): 346-946 Length B (mm) see drawing: Length C (mm) see drawing: 1010 Weight (kg): 27.2 Actuation Z: Motorised Actuation XY: Motorised Add to quote This product is already in your quote request list. Browse the list

VBPMM12 Series XYZ Manipulators

Key Features

VBPMM12-50

VBPMM12-50ZS2

VBPMM12-50S2

VBPMM12-100

VBPMM12-100ZS2

VBPMM12-100S2

VBPMM12-150

VBPMM12-150ZS2

VBPMM12-150S2

VBPMM12-200

VBPMM12-200ZS2

VBPMM12-200S2

VBPMM12-250

VBPMM12-250ZS2

VBPMM12-250S2

VBPMM12-300

VBPMM12-300ZS2

VBPMM12-300S2

VBPMM12-350ZS2

VBPMM12-350S2

VBPMM12-400

VBPMM12-400ZS2

VBPMM12-400S2

VBPMM12-500

VBPMM12-500ZS2

VBPMM12-500S2

VBPMM12-600

VBPMM12-600ZS2

VBPMM12-600S2

Vacuum System Components

Sample Preparation and Deposition

Spectroscopy

Scanning Probe Microscopy

TOF-SIMS

Quantum Transport Measurement

Electrical Probing and Failure Analysis