Ultra High Vacuum SPM

Ultra High Vacuum(UHV) Scanning Probe Microscopy (SPM) has key advantages in terms of its spatial resolution, low temperature and magnetic field capabilities.  The UHV pressure range <<10-8mbar is achieved by baking the system to remove the residual water. As such the environment of the STM tip and the sample is able to stay free of contamination and unwanted adsorption more easily.

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Ultra High Vacuum SPM

Ultra High Vacuum(UHV) Scanning Probe Microscopy (SPM) has key advantages in terms of its spatial resolution, low temperature and magnetic field capabilities.  The UHV pressure range <<10-8mbar is achieved by baking the system to remove the residual water. As such the environment of the STM tip and the sample is able to stay free of contamination and unwanted adsorption more easily.

Key Features


The VSM Instruments product range includes both low temperature and variable temperature SPM systems from two different suppliers.

Ultra High Vacuum SPM

Ultra High Vacuum(UHV) Scanning Probe Microscopy (SPM) has key advantages in terms of its spatial resolution, low temperature and magnetic field capabilities.  The UHV pressure range <<10-8mbar is achieved by baking the system to remove the residual water. As such the environment of the STM tip and the sample is able to stay free of contamination and unwanted adsorption more easily.

Key Features


The VSM Instruments product range includes both low temperature and variable temperature SPM systems from two different suppliers.

CreaTec Low Temperature STM / AFM System

The combined low-temperature scanning tunneling and atomic force microscope (LT-STM/AFM) is an essential part of CreaTec’s product range. In addition to its nanoanalytical capabilities, it allows the precise manipulation of atoms and molecules at
temperatures in the range of 4 to 300 K. The fully compatible low-temperature atomic force microscope (AFM) allows simultaneous measurements of force and tunneling current without cross-talk using constant frequency or constant height control.

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SPECS SPM Aarhus 150

The SPM Aarhus 150 is an outstandingly stable and time saving instrument. A specially-designed variable temperature scanner platform of 3 kg mass with integrated low noise liquid nitrogen (LN2) cooling device guarantees the uncompromised superior SPM performance. Special care was taken to decouple the flow cooler from the sample stage and yet ensure permanent cooling connection between them. For this dedicated flexible copper braids are used to couple the extra heavy scanner platform to the flow cryostat without affecting excellent stability of the SPM Aarhus. A tight mechanical and thermal contact between sample holder and SPM stage allows for the extremely accurate sample temperature control and stability. A typical cool down times of less than 60 min to the temperatures below 130K are achieved. A typical time span of 20 min from insertion of a sample at room temperature to “ready for SPM” at below 130 K and has been shown. For temperature ramps counter heating of the sample is possible even to elevated temperatures up to 400 K. A comparably low LN2 consumption can be realized in operation as well as during the fast cool down of the cryostat from room temperature. About 20 l of LN2 is consumed during initial cool down while the typical LN2 consumption during operation at 130 K is about 10 litres per hour. Through the unification of the SPM mechanics into one STM/AFM unit, the SPM Aarhus 150 can easily be upgraded to AFM by using the KolibriSensor™. Our SPECS scanning probe microscope SPM Aarhus 150 sets a new standard by showing the highest thermal stability at variable temperatures between 90 and 400K without compromising its original mechanical stability. A direct in-situ optical access allows for the sample illumination and investigation of light induced processes. Additionally an evaporation port permits in-situ deposition on the sample surface and investigation of the growth processes during scanning.

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SPECS SPM150 Aarhus NAP

Investigations of catalytic reactions on the surfaces and the attempt to bridge the pressure and material gap between UHV and “real world” applications require an ultra-stable and reliable SPM able to operate in extreme conditions. Once again, the stability and simplicity of the SPM Aarhus design allowes for the extension of the applications in the pressure range between UHV and 100 mbar by developing special near ambient pressure (NAP) design. For this SPM Aarhus head is mounted in side of an in-situ reactor cell made of inert materials (or coated with non-reactive material). By doing so, only the inside of a little reactor cell is flooded with the gas. Easy and fast on-site switch between UHV and near ambient pressure applications is possible by opening a lid on top of the reactor cell. A halogen lamp heater for high temperature applications is mounted directly on the lid allowing all kinds of samples to be imaged at temperatures exceeding 850 K in UHV and 550K at 10 mbar. In-situ tip/sensor preparation by ion sputtering is still feasible when the lid of the reactor is open. A direct in-situ optical access to the sample during measurements at near ambient pressures can be used for investigation of photo catalytic reactions. Both STM tips as well as the KolibriSensor™ can be used with the system without any compromises on its stability.

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IONTOF M6 Plus: Combining TOF-SIMS and SPM in situ

The tool for nano characterisation
Information regarding the chemical composition, physical properties, and three-dimensional structure of materials and devices at the nanometre scale is crucial for new developments in nanoscience and nanotechnology. In a 3D SIMS measurement, the initial topography of the sample surface, as well as topographic changes during the experiment, cannot be easily identified. Scanning Probe Microscopy (SPM) provides complementary information about the surface topography and can also be used to measure the physical properties of the analysed sample.
Through the combination of these two techniques true in situ three-dimensional chemical imaging becomes possible. The M6 Plus platform combines the high-end performance of the M6 with the possibility to perform in situ SPM measurements. The large area SPM unit has a scan range of up to 80 x 80 x 10 µm3 and is ideally suited to provide topographic information for true 3D SIMS measurements.
Micrometre position accuracy
The piezo sample stage of the M6 Plus with sub-micron position accuracy ensures fast and precise movement between the TOF-SIMS and the SPM measurement position.
The stage has a 10 nm encoder resolution and travel speeds of up to 10 mm/s which guarantees a high level of precision and stability.
True 3D chemical imaging
Some samples have a strong initial surface topography which cannot be identified correctly with TOF-SIMS. By combining the chemical information of TOF-SIMS with the dimensional information of SPM a true three-dimensional chemical image can be generated.
Surface profiler mode
The SPM module of the M6 Plus also allows for detailed analysis of large sputter craters. In the so-called surface profiler mode multiple SPM scans are stitched together to measure long SPM line scans. This unique SPM mode is extremely valuable to precisely determine the depth of sputter craters or to measure crater roughness on the nanometre scale.
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