Hard X-Ray XPS (HAXPES)

Conventional X-Ray Photoelectron Spectroscopy (XPS) is a surface-sensitive probe of the sample chemistry with an information depth of approximately 1 – 2.5nm or <10 atomic layers. It uses an X-Ray photon energy of ~1.5keV. In HAXPES higher energy X-Rays in the range of 3-15keV are used which allows a much greater information depth up to ~25nm to be probed. This enables measurements of buried interfaces and bulk properties that would be impossible with conventional XPS.

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Hard X-Ray XPS (HAXPES)

Conventional X-Ray Photoelectron Spectroscopy (XPS) is a surface-sensitive probe of the sample chemistry with an information depth of approximately 1 – 2.5nm or <10 atomic layers. It uses an X-Ray photon energy of ~1.5keV. In HAXPES higher energy X-Rays in the range of 3-15keV are used which allows a much greater information depth up to ~25nm to be probed. This enables measurements of buried interfaces and bulk properties that would be impossible with conventional XPS.

Key Features


• Measure bulk properties, buried interfaces and core levels as well as the top surface
• Choice of synchrotron or laboratory-based systems
• Non-destructive analysis of complex layered or buried structures

Hard X-Ray XPS (HAXPES)

Conventional X-Ray Photoelectron Spectroscopy (XPS) is a surface-sensitive probe of the sample chemistry with an information depth of approximately 1 – 2.5nm or <10 atomic layers. It uses an X-Ray photon energy of ~1.5keV. In HAXPES higher energy X-Rays in the range of 3-15keV are used which allows a much greater information depth up to ~25nm to be probed. This enables measurements of buried interfaces and bulk properties that would be impossible with conventional XPS.

Key Features


• Measure bulk properties, buried interfaces and core levels as well as the top surface
• Choice of synchrotron or laboratory-based systems
• Non-destructive analysis of complex layered or buried structures

EnviroMETROS

EnviroMETROS is a unique metrology platform for the chemical analysis of ultrathin films and 2D materials that allows a detailed characterisation of stoichiometries‚ composition and depth distribution of elements. The system combines XPS with an array of optional techniques such as HAXPES, UPS, IPES, AES, REELS, Raman and Infrared spectroscopies. These techniques can be employed on the same sample spot. It can optionally be configured for NAP XPS, but the base model is a UHV load-locked system. Depending on the system configuration, it can be set up for 80x80mm samples or 8″ or 12″ wafers.

 

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AEOLOS 150 Analyser

Highest transmission wide angle hemispherical energy analyser with 60° acceptance angle, and AD-CMOS detector for photo electron spectroscopy measurements (XPS and UPS) and angular resolved studies (ARXPS) in the pressure regime from UHV to near ambient pressure (NAP upgradable). With this analyser NAP-HAXPES measurements up to 10 keV can be performed.

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µFOCUS 450

This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR-MC micro-focus X-ray source is perfectly suited for small spot, high resolution, and high intensity XPS measurements. The X-ray monochromator operates according to Bragg’s Law of X-ray diffraction. Each wavelength of X-rays (Al Kα, Ag Lα, Cr Kα) is reflected from individually optimized crystals at a specific angle of reflection. For the Al and Ag anodes, quartz crystal are used, which have a 450 mm and 416 mm Rowland circle diameter respectively , whereas for Cr germanium crystals are used with a 676 mm Rowland circle. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si3N4 window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.

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XR50 Dual Anode X-Ray Source

The XR 50 is a high intensity twin anode X-ray source optimised for XPS experiments. The anode is made of silver to avoid any CuLα breakthrough. Due to the use of dual anodes it is possible to switch between two different incident energies without the need to vent the system. Dual anodes with different material coatings are available on request including Al, Mg, Ag, Cr, Zr. The electron optical design of the anode, filament and source housing guarantees maximum X-ray intensity and very low crosstalk between the anode faces.

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FG 22/35 Flood Gun

The FG 22/35 is a compact, easy to handle, reliable flood gun for charge neutralisation of positively-charged insulators or semiconductors. It allows operation in the energy range of 0 – 500 eV for charge compensation in typical XPS/AES and SIMS experiments, respectively.

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Phoibos Series Hemispherical Analysers

For many years, the Phoibos-series analysers have formed the cornerstone of the SPECS analyser product range and as such are well proven in the field. Depending on configuration, the Phoibos series can be adapted for XPS, UPS, ARPES, HAXPES, NAP XPS or ISS. It comes in three possible hemisphere sizes: 100, 150 and 225mm and a range of 1D and 2D detectors including 1D and 2D delayline, 2D-CCD and AD-CMOS. Acceptance angles of +/-15º are standard.

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